发明授权
US4911597A Semiconductor processing system with robotic autoloader and load lock
失效
带有机器人自动装载机和加载锁的半导体处理系统
- 专利标题： Semiconductor processing system with robotic autoloader and load lock
- 专利标题（中）： 带有机器人自动装载机和加载锁的半导体处理系统
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申请号： US89926申请日： 1987-08-25
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公开(公告)号： US4911597A公开(公告)日： 1990-03-27
- 发明人: Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
- 申请人： Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; B65G49/07 ; H01L21/67 ; H01L21/683 ; H05K13/02
摘要：
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
公开/授权文献
- USD417530S Dog boot 公开/授权日：1999-12-07
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