发明授权
- 专利标题: Lapping control system for magnetic transducers
- 专利标题(中): 磁传感器研磨控制系统
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申请号: US250685申请日: 1988-09-28
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公开(公告)号: US4914868A公开(公告)日: 1990-04-10
- 发明人: Mark A. Church , Annayya P. Deshpande , Alain M. Desouches , George S. Pal , Michael P. Salo , Muhammad I. Ullah
- 申请人: Mark A. Church , Annayya P. Deshpande , Alain M. Desouches , George S. Pal , Michael P. Salo , Muhammad I. Ullah
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: B24B49/10
- IPC分类号: B24B49/10 ; B23Q17/22 ; B24B37/04 ; G11B5/39
摘要:
A lapping control system for a row of thin film magnetic transducers formed on a substrate. Each of the magnetic transducers comprises a magnetoresistive (MR) element, and the row is supported on a holder which has an elongated H-shaped slot near one edge to form a beam member upon which the row is mounted. The beam member is capable of being deflected in a substantially quadratic curvature when subjected to pressure from a pressure transducer at the middle of the beam member. The resistance of each of the MR elements is measured during lapping, and a control signal is generated to control the pressure transducers to control lapping with proper BALANCE and BOW and to terminate lapping when the desired MR element height is reached.
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