发明授权
- 专利标题: Apparatus for measuring diameter of crystal
- 专利标题(中): 用于测量晶体直径的装置
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申请号: US249004申请日: 1988-09-23
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公开(公告)号: US4926357A公开(公告)日: 1990-05-15
- 发明人: Nobuo Katsuoka , Yoshihiro Hirano , Tomohiro Kakegawa
- 申请人: Nobuo Katsuoka , Yoshihiro Hirano , Tomohiro Kakegawa
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Company, Limited
- 当前专利权人: Shin-Etsu Handotai Company, Limited
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-240361 19870925
- 主分类号: C30B15/26
- IPC分类号: C30B15/26 ; G01B11/08
摘要:
An apparatus is used in the production of a monocrystalline rod by Czochralski method and is adapted for measuring the diameter of the monocrystalline rod at the melt surface of the melt by processing image signal derived from an image sensor. The measurement of the diameter is conducted by determining the diameter of the monocrystalline rod at the melt surface by processing the output signal from the image sensor, and multiplying the rod image diameter with a function of the difference between the initial melt surface level and a melt surface corrected in accordance with a change in the temperature in the apparatus chamber or a change in the leval of the electrical power supplied to a heater for heating a crucible.
公开/授权文献
- US6107332A Hydrolysis-promoting hydrophobic taxane derivatives 公开/授权日:2000-08-22
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