发明授权
- 专利标题： Germanosilicate spin-on glasses
- 专利标题（中）： 德硅硅酸盐旋涂眼镜
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申请号： US747470申请日： 1985-06-21
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公开(公告)号： US4935095A公开(公告)日： 1990-06-19
- 发明人: William I. Lehrer
- 申请人： William I. Lehrer
- 申请人地址： CA Santa Clara
- 专利权人： National Semiconductor Corporation
- 当前专利权人： National Semiconductor Corporation
- 当前专利权人地址： CA Santa Clara
- 主分类号： H01L29/78
- IPC分类号： H01L29/78 ; C03B8/02 ; C03B19/12 ; H01L21/316 ; H01L21/3205 ; H01L21/768 ; H01L23/532
摘要：
A process is disclosed for forming a planarized or smooth surface binary glass insulating film comprised of germanium dioxide and silicon dioxide by a spin-on process. The resulting structure has a film thickness uniformity which varies less than 5% over the surface of the wafer. The structure is formed by mixing a predetermined solution of TEOS and TEOG in a lower alcohol or ketone solvent and catalyzing by the addition of sufficient acid to raise the pH to 1.5 to 2.0 to favor gel formation. The resultant solution is then spun on at an RPM selected to give the desired film thickness for a given solids content of the solution.
公开/授权文献
- US6127322A Dispersant additives 公开/授权日：2000-10-03
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