Invention Grant
- Patent Title: Scanning micromechanical probe control system
- Patent Title (中): 扫描微机械探头控制系统
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Application No.: US328422Application Date: 1989-03-24
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Publication No.: US4952857APublication Date: 1990-08-28
- Inventor: Paul E. West , Wilfred P. Charette , Arthur Young
- Applicant: Paul E. West , Wilfred P. Charette , Arthur Young
- Applicant Address: CA Pasadena
- Assignee: QuanScan, Inc.
- Current Assignee: QuanScan, Inc.
- Current Assignee Address: CA Pasadena
- Main IPC: G01N27/00
- IPC: G01N27/00 ; G01Q30/02 ; G05B13/00
Abstract:
The scanning micromechanical probe control system for controlling relative movement between a sensor probe and an adjacent sample surface includes a sensor probe for measuring a parameter which varies relative to the relative positioning of the probe and the adjacent surface adapted to generate an error signal indicating one of at least two discrete position conditions; an up/down counter for integrating the error signal and for generating an up/down count signal; and a position control servo for controlling the relative positioning of the probe and the surface responsive to the up/down count signal. An adaptive feedback control most preferably controls the rate of up/down positioning of the sensor probe and the rate of raster scanning of the probe relative to the target surface.
Public/Granted literature
- US5595397A Method and apparatus for spreading a liquid slurry Public/Granted day:1997-01-21
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