发明授权
- 专利标题： Thin film transistor array and method of manufacturing the same
- 专利标题（中）： 薄膜晶体管阵列及其制造方法
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申请号： US188623申请日： 1988-04-29
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公开(公告)号： US4958205A公开(公告)日： 1990-09-18
- 发明人: Mamoru Takeda , Ichiro Yamashita , Isamu Kitahiro
- 申请人： Mamoru Takeda , Ichiro Yamashita , Isamu Kitahiro
- 申请人地址： JPX Osaka
- 专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址： JPX Osaka
- 优先权： JPX60-63413 19850329; JPX60-63414 19850329
- 主分类号： G02F1/1368
- IPC分类号： G02F1/1368 ; H01L29/45 ; H01L29/786
摘要：
A self-aligned TFT array for liquid-crystal display devices and a method of manufacturing the array are disclosed. A protective insulating layer on a semiconductor layer is exactly aligned with a gate electrode. A self-alignment method is used for patterning the protective insulating layer and an impurity-doped semiconductor layer on the semiconductor layer. No lift-off process is necessary.