发明授权
US4967690A Electroless plating with bi-level control of dissolved oxygen, with specific location of chemical maintenance means 失效
化学镀具有双层控制溶解氧,具有化学维护方式的具体位置

Electroless plating with bi-level control of dissolved oxygen, with
specific location of chemical maintenance means
摘要:
Nodule formation in a continuous electroless copper plating system is minimized by independently controlling the dissolved oxygen contents on the plating solution in the bath and in the associated external piping. The level of dissolved oxygen in the plating tank is maintained at a value such that satisfactory plating takes place. At the point where the plating solution leaves the tank, additional oxygen gas is introducted into the solution so that the level of dissolved oxygen in the plating solution in the external piping is high enough to prevent any plating from taking place in the external piping and so that in the external piping the copper is etched or dissolved back into solution. At the end of the external piping, the dissolved oxygen level is reduced so that the dissolved oxygen level of the plating solution in the tank is maintained at the level where plating will take place.
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