发明授权
- 专利标题： Single beam AC interferometer
- 专利标题（中）： 单光束交流干涉仪
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申请号： US321103申请日： 1989-03-09
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公开(公告)号： US4968144A公开(公告)日： 1990-11-06
- 发明人: Robert L. Thomas , Pao-Kuang Kuo , Lawrence D. Favro
- 申请人： Robert L. Thomas , Pao-Kuang Kuo , Lawrence D. Favro
- 申请人地址： MI Detroit
- 专利权人： Wayne State University
- 当前专利权人： Wayne State University
- 当前专利权人地址： MI Detroit
- 主分类号： G01N21/27
- IPC分类号： G01N21/27 ; G01H9/00 ; G01J9/02 ; G01N3/06 ; G01N21/17 ; G01N21/55 ; G01N29/24
摘要：
A single beam interferometer (10) comprises an intensity modulated laser beam (16) having a focus area for heating a test area (18) on the surface of a sample (12) producing a thermal bump (20). An unfocused probe laser beam (30) is directed toward the solid at an angle and has a beam area greater than the focus area of the heating beam (16). The sample (12) has a reflective surface for reflecting the probe beam (30). The reflected beam (31) comprises an AC beam portion (32) refracted by the thermal bump (20) and a DC beam portion (34) reflected off the unheated surface of the sample (12). The interference pattern (36) produced by the reflected beam (31) is detected and processed to obtain optical, elastic and thermal parameters of the sample (12).
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