发明授权
- 专利标题: Laser scribing method
- 专利标题(中): 激光划线法
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申请号: US333912申请日: 1989-04-06
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公开(公告)号: US4970368A公开(公告)日: 1990-11-13
- 发明人: Shunpei Yamazaki , Kenji Itoh , Susumu Nagayama
- 申请人: Shunpei Yamazaki , Kenji Itoh , Susumu Nagayama
- 申请人地址: JPX Hase Atsugi
- 专利权人: Semiconductor Energy Laboratory Co. Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co. Ltd.
- 当前专利权人地址: JPX Hase Atsugi
- 优先权: JPX59-117538 19840608; JPX59-211769 19841008
- 主分类号: B41M5/26
- IPC分类号: B41M5/26 ; H01L21/302 ; H01L27/142 ; H01L31/0224 ; H01L31/0392 ; H05K3/02
摘要:
In a method of making an electronic device having at least a transparent conductive layer, which includes at least a step of forming a transparent conductive layer member and a step of forming a transparent conductive layer by patterning the transparent conductive layer member using a spot-shaped or linear laser beam or beams, each of which has a short wavelength of 400 nm or less and optical energy greater than the optical energy band gap of the transparent conductive layer.
公开/授权文献
- US5639635A Process for bacterial production of polypeptides 公开/授权日:1997-06-17
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