发明授权
- 专利标题: Bi-polar transistor structure
- 专利标题(中): 双极晶体管结构
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申请号: US318604申请日: 1989-03-03
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公开(公告)号: US4974045A公开(公告)日: 1990-11-27
- 发明人: Yoshihisa Okita
- 申请人: Yoshihisa Okita
- 申请人地址: JPX
- 专利权人: Oki Electric Industry Co., Inc.
- 当前专利权人: Oki Electric Industry Co., Inc.
- 当前专利权人地址: JPX
- 优先权: JPX63-55023 19880310
- 主分类号: H01L21/331
- IPC分类号: H01L21/331 ; H01L29/73 ; H01L29/732
摘要:
A bi-polar transistor structure in a superhigh speed logic integrated circuit, and a process for producing the same are disclosed. The transistor has a substantially coaxial symmetric structure. Single crystal active layers as base and collector regions have peripheries surrounded wholly or partially by respective polycrystalline electrode layers. The polysilicon electrodes have lateral portions and downward depending portions that connect to single crystal layers. The polycrystalline electrode layers are separated from each other by insulation. One process for producing the structure uses only thin film forming techniques and etching techniques to dispose the active layers, an emitter electrode layer, parts of the other electrode layers and parts of the insulating layers inside a recess formed in an insulating layer formed on a substrate. Another process uses a photoetching technique by which polycrystalline layers for base and collector electrodes are patterned. Around the patterned polycrystalline electrode, side wall insulating layers are formed in the respective later steps.
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