发明授权
US5007788A Pitch changing device for changing pitches of plate-like objects and
method of changing pitches
失效
用于改变板状物体的间距的变桨装置和改变桨距的方法
- 专利标题： Pitch changing device for changing pitches of plate-like objects and method of changing pitches
- 专利标题（中）： 用于改变板状物体的间距的变桨装置和改变桨距的方法
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申请号： US342345申请日： 1989-04-24
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公开(公告)号： US5007788A公开(公告)日： 1991-04-16
- 发明人: Takanobu Asano , Kenichi Yamaga , Wataru Ohkase
- 申请人： Takanobu Asano , Kenichi Yamaga , Wataru Ohkase
- 申请人地址： JPX Kanagawa
- 专利权人： Tel Sagami Limited
- 当前专利权人： Tel Sagami Limited
- 当前专利权人地址： JPX Kanagawa
- 优先权： JPX63-103403 19880425; JPX63-119580 19880517; JPX63-179773 19880719
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
A pitch changing device of the present invention includes a lift mechanism for unloading a plurality of wafers arranged in a cassette at predetermined pitches from the cassette while the pitches are kept unchanged, and a chuck mechanism for holding the unloaded wafers while the pitches are kept unchanged. The chuck mechanism includes moving pieces mounted to be movable in an arrangement direction of the wafers, for respectively supporting the wafers, elastic members mounted in the movable pieces to be expandible/contractible in the arrangement direction of the wafers, and a driving mechanism for expanding/contracting the elastic members. When the elastic members expand/contract by the driving mechanism, the pitches of the wafers are changed while the wafers are held. The lift mechanism includes a handler for variably moving wafer stands in the arrangement direction of the wafers, and changes the pitches while the wafers are lifted.
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