发明授权
- 专利标题: X-Y stage with ultrasonic actuator
- 专利标题(中): 超声波执行机构的X-Y平台
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申请号: US423480申请日: 1989-10-17
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公开(公告)号: US5013958A公开(公告)日: 1991-05-07
- 发明人: Kazumasa Ohnishi , Koichi Naito , Toru Nakazawa
- 申请人: Kazumasa Ohnishi , Koichi Naito , Toru Nakazawa
- 申请人地址: JPX Tokyo
- 专利权人: Alps Electric Co., Ltd.
- 当前专利权人: Alps Electric Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX63-262009 19881018
- 主分类号: B23Q1/00
- IPC分类号: B23Q1/00 ; B23Q1/34 ; B23Q1/44 ; B23Q1/62 ; H01L41/09 ; H02N2/00
摘要:
An X-Y stage including a fixed plate, a moving plate adapted to linearly reciprocatively move relative to the fixed plate, and an ultrasonic linear motor provided on either the fixed plate or the moving plate. The ultrasonic linear motor is provided with at lest two leg portions oriented in a direction perpendicular to a moving direction of the moving plate, a body portion for connecting base ends of the leg portions, and vibration sources for vibrating the leg portions and the body portion. The leg portions have free ends pressed against the other of the fixed plate on which the motor is not provided and the moving plate.
公开/授权文献
- USD278084S Portable lamp 公开/授权日:1985-03-19
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