发明授权
- 专利标题: Raised base bipolar transistor structure and its method of fabrication
- 专利标题(中): 基极双极晶体管结构及其制作方法
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申请号: US445251申请日: 1989-12-01
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公开(公告)号: US5017990A公开(公告)日: 1991-05-21
- 发明人: Tze-Chiang Chen , Ching-Te Kent Chuang , Guann-Pyng Li , Tak Hung Ning
- 申请人: Tze-Chiang Chen , Ching-Te Kent Chuang , Guann-Pyng Li , Tak Hung Ning
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: H01L29/73
- IPC分类号: H01L29/73 ; H01L21/331 ; H01L29/10 ; H01L29/732
摘要:
The invention relates to a bipolar transistor structure which includes a layer of semiconductor material having a single crystal raised base, a single crystal or polycrystalline emitter and adjacent polycrystalline regions which provide an electrical connection to the emitter. The invention also relates to the method of fabricating such a structure and includes the step of depositing a conformal layer of semiconductor material of one conductivity type over a region of opposite conductivity and over insulation such that single crystal and polycrystalline regions form over single crystal material and insulation, respectively. In a subsequent step, a layer of opposite conductivity type semiconductor material is deposited on the first layer forming single crystal or polycrystalline material over single crystal and polycrystalline material over polycrystalline. Then, in a final step, the structure is subjected to an out-diffusion step which simultaneously forms a single crystal emitter region of opposite conductivity type, a p-n junction in the one conductivity type single crystal region and regions of opposite conductivity type which act as an interconnection to the emitter region.
公开/授权文献
- US5610798A Personal computer housing 公开/授权日:1997-03-11