发明授权
- 专利标题： Photoelectron image projection apparatus
- 专利标题（中）： 光电子图像投影仪
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申请号： US238047申请日： 1988-08-30
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公开(公告)号： US5029222A公开(公告)日： 1991-07-02
- 发明人: Akio Yamada , Hiroshi Yasuda , Kiichi Sakamoto , Jinko Kudou
- 申请人： Akio Yamada , Hiroshi Yasuda , Kiichi Sakamoto , Jinko Kudou
- 申请人地址： JPX Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX62-219366 19870902; JPX62-219372 19870902
- 主分类号： G03F7/26
- IPC分类号： G03F7/26 ; G03F9/00 ; H01J37/30 ; H01L21/32
摘要：
A photoelectron image projection apparatus has a device for detecting an image of a pattern of a mask within a predetermined projection region of the mask. An image signal describing the detected image is compared with a reference image signal which is known from the pattern of the mask, and a defect in the projection pattern is detected when the two compared image signals differ.
公开/授权文献
- US5413897A Silver halide photographic material 公开/授权日：1995-05-09