发明授权
US5051599A Device for recognizing the impact site of a charge carrier beam on a
target
失效
用于识别电荷载流子束在目标上的冲击位置的装置
- 专利标题： Device for recognizing the impact site of a charge carrier beam on a target
- 专利标题（中）： 用于识别电荷载流子束在目标上的冲击位置的装置
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申请号： US470857申请日： 1990-01-26
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公开(公告)号： US5051599A公开(公告)日： 1991-09-24
- 发明人: Ewald Benes , Martin Groschl , Michael Schmid , Hans-Joachim Siegmund , Friedrich-Werner Thomas , Gernot Thorn
- 申请人： Ewald Benes , Martin Groschl , Michael Schmid , Hans-Joachim Siegmund , Friedrich-Werner Thomas , Gernot Thorn
- 申请人地址： DEX
- 专利权人： Leybold Aktiengesellschaft
- 当前专利权人： Leybold Aktiengesellschaft
- 当前专利权人地址： DEX
- 优先权： DEX3902274 19890126
- 主分类号： G01T1/29
- IPC分类号： G01T1/29 ; B23K15/00 ; G01Q30/02 ; G21K5/04 ; H01J37/30
摘要：
The invention relates to a device for recognizing the impact site (29, 37) of a charge carrier beam on a target. This device has two position-sensitive detectors (22, 23) above the target which have a given distance from each other and from the target and on which via imaging systems (24, 25) the impact site (29, 37) of the charge carrier beam is imaged by means of X-rays. The output signals of these detectors (22, 23) are placed on a special evaluation device which determines all three spatial coordinates of the impact site (29, 37) of the charge carrier beam.
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