公开(公告)号：US5051599A

公开(公告)日：1991-09-24

申请号：US470857

申请日：1990-01-26

申请人： Ewald Benes ,  Martin Groschl ,  Michael Schmid ,  Hans-Joachim Siegmund ,  Friedrich-Werner Thomas ,  Gernot Thorn

发明人： Ewald Benes ,  Martin Groschl ,  Michael Schmid ,  Hans-Joachim Siegmund ,  Friedrich-Werner Thomas ,  Gernot Thorn

IPC分类号： G01T1/29 ,  B23K15/00 ,  G01Q30/02 ,  G21K5/04 ,  H01J37/30

CPC分类号： H01J37/3005 ,  B23K15/0013

摘要： The invention relates to a device for recognizing the impact site (29, 37) of a charge carrier beam on a target. This device has two position-sensitive detectors (22, 23) above the target which have a given distance from each other and from the target and on which via imaging systems (24, 25) the impact site (29, 37) of the charge carrier beam is imaged by means of X-rays. The output signals of these detectors (22, 23) are placed on a special evaluation device which determines all three spatial coordinates of the impact site (29, 37) of the charge carrier beam.

摘要翻译： 本发明涉及用于识别目标上电荷载流子束的冲击位置（29,37）的装置。 该装置具有在目标上方的两个位置敏感的检测器（22,23），它们彼此具有一定的距离并且与目标相对，并且通过成像系统（24,25）将电荷的冲击部位（29,37） 载波束通过X射线成像。 这些检测器（22,23）的输出信号被放置在确定电荷载流子束的冲击位置（29,37）的所有三个空间坐标的特殊评估装置上。

公开(公告)号：US4878755A

公开(公告)日：1989-11-07

申请号：US881708

申请日：1986-07-03

申请人： Hans-Joachim Siegmund ,  Horst Schwiecker

发明人： Hans-Joachim Siegmund ,  Horst Schwiecker

IPC分类号： C23C14/54 ,  G01B11/06 ,  G01N21/59 ,  G01N21/84

CPC分类号： C23C14/54 ,  G01B11/0683 ,  G01N21/59 ,  G01N21/8422 ,  G01N2201/128

摘要： Process for measuring the optical properties of thin layers while they are being built up in vacuum coating installations. For this purpose, at least one test object is passed through a stationary measuring light beam and the transmission behavior of the test object is evaluated by measurement. A reference point for the measurements is fixed in each case by reference measurements at intervals of time. In addition, at least one opaque measurement zone and at least one measuring zone, which does not attenuate the measuring light beam, are disposed in path of motion of the test object. The ratio of the measured value of the test object, decreased by the measured value of the opaque measuring zone, to the measured value of the nonattenuating measuring zone, decreased by the measured value of the opaque measuring zone, is formed by an arithmetic logic unit.

摘要翻译： 在真空涂层装置中建立薄层的光学性能的测量方法。 为此，至少一个测试对象通过静止的测量光束，并通过测量来评估测试对象的传输行为。 在每种情况下，通过参考测量在时间间隔固定测量的参考点。 此外，至少一个不透明测量区域和至少一个不衰减测量光束的测量区域被设置在测试对象的运动路径中。 通过算术逻辑单元形成测试对象的测量值与不透明测量区域的测量值相比减小到不透明测量区域的测量值的比例， 。