发明授权
- 专利标题： Pressure sensor including a diaphragm having a protective layer thereon
- 专利标题（中）： 压力传感器，包括具有保护层的膜片
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申请号： US499615申请日： 1990-03-26
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公开(公告)号： US5076147A公开(公告)日： 1991-12-31
- 发明人: Frank Hegner , Manfred Frank
- 申请人： Frank Hegner , Manfred Frank
- 申请人地址： DEX
- 专利权人： Endress u. Hauser GmbH u. Co.
- 当前专利权人： Endress u. Hauser GmbH u. Co.
- 当前专利权人地址： DEX
- 优先权： DEX3912217 19890413
- 主分类号： G01L9/00
- IPC分类号： G01L9/00 ; G01L19/06
摘要：
The pressure sensor consists of a substrate and a diaphragm joined together around the periphery so as to form a chamber. The surface of the diaphragm facing away from the substrate is exposed to a medium whose pressure is to be measured. To protect the diaphragm against corrosion or abrasion, the diaphragm surface exposed to the medium is covered with a layer of silicon carbide, preferably by chemical vapor deposition.
公开/授权文献
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