公开(公告)号：US5076147A

公开(公告)日：1991-12-31

申请号：US499615

申请日：1990-03-26

申请人： Frank Hegner ,  Manfred Frank

发明人： Frank Hegner ,  Manfred Frank

IPC分类号： G01L9/00 ,  G01L19/06

CPC分类号： G01L9/0075 ,  G01L19/0627

摘要： The pressure sensor consists of a substrate and a diaphragm joined together around the periphery so as to form a chamber. The surface of the diaphragm facing away from the substrate is exposed to a medium whose pressure is to be measured. To protect the diaphragm against corrosion or abrasion, the diaphragm surface exposed to the medium is covered with a layer of silicon carbide, preferably by chemical vapor deposition.

摘要翻译： 压力传感器由基板和隔膜围绕周边连接在一起形成一个室。 面对离开基板的隔膜的表面暴露于要测量其压力的介质。 为了防止隔膜受到腐蚀或磨损，暴露于介质的隔膜表面被碳化硅层覆盖，优选通过化学气相沉积。

公开(公告)号：US5050035A

公开(公告)日：1991-09-17

申请号：US496539

申请日：1990-03-20

申请人： Frank Hegner ,  Manfred Frank

发明人： Frank Hegner ,  Manfred Frank

IPC分类号： G01L9/12 ,  G01L9/00

CPC分类号： G01L9/0075 ,  Y10T29/435

摘要： This rugged, temperature-shock-insensitive, and low-cost pressure sensor (1) has a diaphragm (2) and a substrate (3) which are alumina-ceramic parts, preferably with a purity of 96%, are joined together in a defined spaced relationship and parallel to each other by means of an intermediate layer, forming a, preferably closed, chamber, and have flat inner surfaces which are provided with at least one conductive layer for forming at least one capacitor and are electrically connected to the respective rear side of the diaphragm or substrate via through-hole coatings. For the conductive layers (6, 7, 8), the through-hole coatings (12, 13, 14), and the intermediate layer (5), use is made of a conductive paste or a resistive paste with a sheet resistivity not higher than 1 ohm/square, which are applied using silk-screening techniques.

摘要翻译： 这种坚固的耐温度低，低成本的压力传感器（1）具有隔膜（2）和基板（3），其是氧化铝 - 陶瓷部件，优选纯度为96％，在 定义的间隔关系并且通过中间层彼此平行，形成优选封闭的室，并且具有平坦的内表面，其设置有至少一个用于形成至少一个电容器的导电层，并且电连接到相应的 隔膜或基板的后侧通过通孔涂层。 对于导电层（6,7,8），通孔涂层（12,13,14）和中间层（5）的使用由导电浆料或电阻浆料制成，其电阻率不高 超过1欧姆/平方米，使用丝印技术应用。

公开(公告)号：US5050034A

公开(公告)日：1991-09-17

申请号：US570312

申请日：1990-08-21

申请人： Frank Hegner ,  Manfred Frank ,  Thomas Klahn

发明人： Frank Hegner ,  Manfred Frank ,  Thomas Klahn

IPC分类号： G01L9/12 ,  G01L9/00 ,  H01L29/84

CPC分类号： G01L9/0075 ,  Y10T29/435

摘要： The substrate (12) and/or the diaphragm (11) of the pressure sensor (10) are made of ceramic, glass, or a single-crystal material. The side of the diaphragm (11) facing the substrate (12) is covered with a layer of silicon carbide, niobium, or tantalum which, in turn, is covered with a protective layer (21) and serves as one capacitor electrode (14). The side of the substrate (12) facing the diaphragm (11) is covered with at least one additional layer of any one of said materials which, in turn, is covered with an additional protective layer (22) and serves as the second capacitor electrode (15). Substrate (12) and diaphragm (11) are soldered together by a formed part of active solder (20) which also serves as a spacer.This pressure sensor can be manufactured in a single soldering step. The maximum load capacity of the diaphragm is determined not by the strength of the joint, but only by the strength of the diaphragm material. The pressure sensor can be used at higher temperatures than pressure sensors with glass-frit joints.

摘要翻译： 压力传感器（10）的基板（12）和/或隔膜（11）由陶瓷，玻璃或单晶材料制成。 面对衬底（12）的隔膜（11）的一侧覆盖有碳化硅，铌或钽层，其又被保护层（21）覆盖并用作一个电容器电极（14） 。 衬底（12）面向隔膜（11）的一侧被至少一层所述材料的另外一层覆盖，所述另外的层又被附加的保护层（22）覆盖，并且用作第二电容器电极 （15）。 基板（12）和隔膜（11）通过也用作间隔件的有源焊料（20）的形成部分焊接在一起。 该压力传感器可以在单个焊接步骤中制造。 隔膜的最大负载能力不是由接头的强度决定，而是由隔膜材料的强度决定。 压力传感器可以在比玻璃料接头的压力传感器更高的温度下使用。

公开(公告)号：US20120289023A1

公开(公告)日：2012-11-15

申请号：US13365774

申请日：2012-02-03

申请人： Carsten Ahrens ,  Rudolf Berger ,  Manfred Frank ,  Uwe Hoeckele ,  Bernhard Knott ,  Ulrich Krumbein ,  Wolfgang Lehnert ,  Berthold Schuderer ,  Juergen Wagner ,  Stefan Willkofer

发明人： Carsten Ahrens ,  Rudolf Berger ,  Manfred Frank ,  Uwe Hoeckele ,  Bernhard Knott ,  Ulrich Krumbein ,  Wolfgang Lehnert ,  Berthold Schuderer ,  Juergen Wagner ,  Stefan Willkofer

IPC分类号： H01L21/762

CPC分类号： H01L21/76224 ,  H01L21/762 ,  H01L21/76232 ,  H01L21/78 ,  H01L23/31 ,  H01L23/3185 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method for producing a semiconductor device having a sidewall insulation includes providing a semiconductor body having a first side and a second side lying opposite the first side. At least one first trench is at least partly filled with insulation material proceeding from the first side in the direction toward the second side into the semiconductor body. The at least one first trench is produced between a first semiconductor body region for a first semiconductor device and a second semiconductor body region for a second semiconductor device. An isolating trench extends from the first side of the semiconductor body in the direction toward the second side of the semiconductor body between the first and second semiconductor body regions in such a way that at least part of the insulation material of the first trench adjoins at least a sidewall of the isolating trench. The second side of the semiconductor body is partly removed as far as the isolating trench.

摘要翻译： 一种制造具有侧壁绝缘体的半导体器件的方法包括提供具有第一侧和与第一侧相对的第二侧的半导体本体。 至少一个第一沟槽至少部分地填充有绝缘材料，该绝缘材料从朝向第二侧的方向的第一侧进入半导体本体。 在第一半导体器件的第一半导体体区域和第二半导体器件的第二半导体本体区域之间产生至少一个第一沟槽。 隔离沟槽从半导体本体的第一侧沿第一和第二半导体主体区域之间的半导体本体的第二侧的方向延伸，使得第一沟槽的绝缘材料的至少一部分至少邻接 隔离沟槽的侧壁。 半导体主体的第二面部分地被去除到隔离沟槽的一侧。

公开(公告)号：US06531676B2

公开(公告)日：2003-03-11

申请号：US09761004

申请日：2001-01-16

申请人： Robert Schwemmer ,  Manfred Frank

发明人： Robert Schwemmer ,  Manfred Frank

IPC分类号： B23K2620

CPC分类号： H01R43/0221 ,  H01R4/029 ,  Y10T29/49174 ,  Y10T29/49179

摘要： A method of producing an electrically conductive connection by laser radiation includes providing a connecting wire of a material with a higher melting temperature providing a connecting carrier of a material with a lower melting temperature, joining the connecting wire with the connecting carrier without an additional material, melting the connecting carrier with a lower melting temperature, and melting the connecting wire with a higher melting temperature on an outer surface.

摘要翻译： 通过激光辐射制造导电连接的方法包括提供具有较高熔融温度的材料的连接线，提供具有较低熔融温度的材料的连接载体，将连接线与连接载体连接，而不需要额外的材料， 以较低的熔化温度熔化连接载体，并在外表面上以更高的熔化温度熔化连接丝。

公开(公告)号：US08101517B2

公开(公告)日：2012-01-24

申请号：US12568925

申请日：2009-09-29

申请人： Manfred Frank ,  Ivan Nikitin ,  Thomas Kunstmann

发明人： Manfred Frank ,  Ivan Nikitin ,  Thomas Kunstmann

IPC分类号： H01L21/00

CPC分类号： H01L21/76898 ,  H01L21/288 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00012 ,  H01L2924/00

摘要： One or more embodiments may relate to a method for making a semiconductor structure, the method including: forming an opening at least partially through a workpiece; and forming an enclosed cavity within the opening, the forming the cavity comprising forming a paste within the opening.

摘要翻译： 一个或多个实施例可涉及用于制造半导体结构的方法，所述方法包括：至少部分地通过工件形成开口; 以及在所述开口内形成封闭空腔，形成所述空腔包括在所述开口内形成浆料。

公开(公告)号：US5612691A

公开(公告)日：1997-03-18

申请号：US397472

申请日：1995-03-02

申请人： Gunter Murmann ,  Manfred Frank

发明人： Gunter Murmann ,  Manfred Frank

IPC分类号： G06F3/02 ,  H01H13/84 ,  H03K17/94 ,  H03M11/00

CPC分类号： G06F3/0216 ,  G06F3/0221 ,  H01H13/84 ,  H01H2217/028 ,  H01H2223/05

摘要： In an ergonomic keyboard comprising at least two housing sections with separate key pads wherein the two housing sections are interconnected by a joint permitting pivoting and also tilting of the two housing sections relative to each other, the joint comprises a coil spring which extends between, and is connected to, the two housing sections at the end of the housing sections remote from an operator so as to form a universal joint between the two housing sections, and a sector-shaped indexing plate is mounted with one end firmly to one of the housing sections and extends into the other housing section so that it bridges any gap formed between the two housing sections when they are pivoted apart, and the other housing section has a guide pin projecting into a partial circular guide slot formed in the indexing plate and having a center of curvature coinciding with the universal joint pivoting center for guiding the two housing sections relative to each other.

摘要翻译： 一种符合人体工程学的键盘，其包括至少两个具有单独的键盘的壳体部分，其中两个壳体部分通过接头相互连接，允许两个壳体部分相对于彼此枢转和倾斜，该接头包括螺旋弹簧， 连接到壳体部分的端部处的远离操作者的两个壳体部分，以在两个壳体部分之间形成万向接头，并且扇形分度板的一端牢固地安装到壳体 并且延伸到另一个壳体部分中，使得它们在两个壳体部分枢转分开时桥接形成在两个壳体部分之间的间隙，另一个壳体部分具有突出到形成在分度板中的部分圆形导槽中的引导销，并且具有 曲率中心与万向节枢转中心重合，用于相对于彼此引导两个壳体部分。

公开(公告)号：US5120952A

公开(公告)日：1992-06-09

申请号：US536598

申请日：1990-06-28

申请人： Heribert Geisselmann ,  Manfred Frank

发明人： Heribert Geisselmann ,  Manfred Frank

IPC分类号： D05B69/00 ,  D06H3/08 ,  G01B11/00

CPC分类号： D05B69/00 ,  D06H3/08

摘要： In a device for ascertaining the actual feed transmittted by an feed devicef an industrial sewing machine to a material to be sewn, in which the number of the threads moved across a sensor arrangement is counted and the feed is calculated from the previously detected thread density, it is provided, for obtaining an exact thread count which is as independent as possible of the orientation of the sewn web, to place ahead of the photocell (10) of the sensor arrangement a rotating slit diaphragm (7) with at least one radially extending parallel limited slit (8). Preferably a second, rotationally adjustable, but fixed slit diaphragm (5) is provided, having slits (6) opening across a set angular sector, the rotatitng slit diaphragm (7) having a larger number of slits (8). Because of this the required rpm of the slit diaphragm (7) can be reduced. To avoid errors caused by the pattern of the material it is possible to operate in the relatively longer wave infrared spectrum.

摘要翻译： PCT No.PCT / EP89 / 00049 Sec。 371日期1990年6月28日第 102（e）日期1990年6月28日PCT 1989年1月18日PCT PCT。 出版物WO89 / 06715 日期：1989年7月27日。在用于确定由工业缝纫机的进给装置传送到待缝合材料的实际进给的装置中，其中跨过传感器装置移动的纱线数被计数，并且进给是 根据先前检测到的线密度计算，为了获得尽可能独立的缝合纤维网的取向的精确线数，提供在传感器装置的光电池（10）之前的旋转狭缝光阑（ 7）具有至少一个径向延伸的平行限制狭缝（8）。 优选地，提供第二可旋转地但可固定的狭缝光阑（5），其具有穿过设定角度扇形部分的开口（6），所述旋转狭缝光阑（7）具有较大数量的狭缝（8）。 因此，可以减小狭缝光阑（7）的所需转速。 为了避免由材料图案引起的错误，可以在相对较长的波长红外光谱中进行操作。

公开(公告)号：US4897603A

公开(公告)日：1990-01-30

申请号：US302828

申请日：1989-01-26

申请人： Joachim Bieber ,  Manfred Frank ,  Wolfgang Schneider

发明人： Joachim Bieber ,  Manfred Frank ,  Wolfgang Schneider

IPC分类号： G01P3/487 ,  G01P3/46 ,  H02K29/08

CPC分类号： H02K29/08 ,  G01P3/465

摘要： The invention provides an arrangement for determining the speed and rotor position of an electric machine, which arrangement consists of a tachometer generator having a permanent-magnet-excited rotor and a coaxially arranged rotor position transmitter which has a rotor body equipped with permanent magnets. Around the circumference of the rotor body magnetic-field sensitive sensor elements are arranged. A compact assembly of the tachometer generator and rotor position transmitter without detrimental mutual interference is possible by the provision that first permanent magnets magnetized in the tangential direction are arranged centered to the pole gaps of the tachometer generator rotor at the rotor body in such a manner that the sides of two adjacent permanent magnets facing each other have the same polarity as the magnet pole extending between the respective pole gaps of the tachometer generator rotor. Furthermore at least one second permanent magnet magnetized in the direction of an axis of rotation is arranged on the side of the rotor body adjacent to the tachometer generator rotor, centered relative to each two first permanent magnets in such a manner that its side facing the tachometer generator rotor has the opposite polarity (N or S, respectively) as the opposite magnet pole of the tachometer generator rotor.

摘要翻译： 本发明提供了一种用于确定电机的速度和转子位置的装置，该装置由具有永磁激励转子的转速计发生器和同轴布置的转子位置变送器组成，转子位置传感器具有装备有永磁体的转子体。 围绕转子体周围设置磁场敏感传感器元件。 转速计发生器和转子位置变送器的紧凑组件可以通过设置在转子主体处以沿切向方向磁化的第一永磁体以转子座发电机转子的极间隙为中心的方式，使得转子体发电机和转子位置变送器之间不会有相互干扰， 两个相邻的永磁体彼此面对的侧面具有与在转速计发电机转子的各极间间延伸的磁极相同的极性。 此外，在旋转体的方向上磁化的至少一个第二永久磁体被布置在转子体的与转速计发生器转子相邻的侧面上，相对于每两个第一永久磁铁居中，使得其面向转速表 发电机转子具有与转速计发电机转子的相对磁极相反的极性（分别为N或S）。

公开(公告)号：US09236290B2

公开(公告)日：2016-01-12

申请号：US13365774

申请日：2012-02-03

申请人： Carsten Ahrens ,  Rudolf Berger ,  Manfred Frank ,  Uwe Hoeckele ,  Bernhard Knott ,  Ulrich Krumbein ,  Wolfgang Lehnert ,  Berthold Schuderer ,  Juergen Wagner ,  Stefan Willkofer

发明人： Carsten Ahrens ,  Rudolf Berger ,  Manfred Frank ,  Uwe Hoeckele ,  Bernhard Knott ,  Ulrich Krumbein ,  Wolfgang Lehnert ,  Berthold Schuderer ,  Juergen Wagner ,  Stefan Willkofer

IPC分类号： H01L21/762 ,  H01L23/31 ,  H01L21/78 ,  H01L23/48

CPC分类号： H01L21/76224 ,  H01L21/762 ,  H01L21/76232 ,  H01L21/78 ,  H01L23/31 ,  H01L23/3185 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method for producing a semiconductor device having a sidewall insulation includes providing a semiconductor body having a first side and a second side lying opposite the first side. At least one first trench is at least partly filled with insulation material proceeding from the first side in the direction toward the second side into the semiconductor body. The at least one first trench is produced between a first semiconductor body region for a first semiconductor device and a second semiconductor body region for a second semiconductor device. An isolating trench extends from the first side of the semiconductor body in the direction toward the second side of the semiconductor body between the first and second semiconductor body regions in such a way that at least part of the insulation material of the first trench adjoins at least a sidewall of the isolating trench. The second side of the semiconductor body is partly removed as far as the isolating trench.

摘要翻译： 一种制造具有侧壁绝缘体的半导体器件的方法包括提供具有第一侧和与第一侧相对的第二侧的半导体本体。 至少一个第一沟槽至少部分地填充有绝缘材料，该绝缘材料从朝向第二侧的方向的第一侧进入半导体本体。 在第一半导体器件的第一半导体体区域和第二半导体器件的第二半导体本体区域之间产生至少一个第一沟槽。 隔离沟槽从半导体本体的第一侧沿第一和第二半导体主体区域之间的半导体本体的第二侧的方向延伸，使得第一沟槽的绝缘材料的至少一部分至少与第一沟槽的绝缘材料相邻 隔离沟槽的侧壁。 半导体主体的第二面部分地被去除到隔离沟槽的一侧。