发明授权
US5079430A Ultraviolet radiation projector and optical image forming apparatus
失效
ULTRAVIOLET辐射投影仪和光学图像形成装置
- 专利标题: Ultraviolet radiation projector and optical image forming apparatus
- 专利标题(中): ULTRAVIOLET辐射投影仪和光学图像形成装置
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申请号: US499943申请日: 1990-03-27
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公开(公告)号: US5079430A公开(公告)日: 1992-01-07
- 发明人: Masanobu Yamamoto , Nobutomo Umeki , Katsutoshi Ohno , Kazumine Itoh
- 申请人: Masanobu Yamamoto , Nobutomo Umeki , Katsutoshi Ohno , Kazumine Itoh
- 申请人地址: JPX Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-112503 19890501
- 主分类号: G03B15/00
- IPC分类号: G03B15/00 ; G03F1/00 ; G03F7/20 ; G09G1/00 ; H01J63/06 ; H01L21/027 ; H01L21/30 ; H05K3/00
摘要:
An ultraviolet radiation projector of this invention includes a focusing optical member arranged between an exposure surface of an ultraviolet sensitive material and a panel surface of a CRT for emitting an ultraviolet beam to expose the exposure surface which is kept separated from the focusing optical member, thereby preventing contact between the exposure surface and the focusing optical member. An optical image forming apparatus of this invention can form a high-precision two-dimensional image for an electronic circuit pattern by exposing the exposure surface with a pattern corresponding to a desired electronic circuit pattern using the ultraviolet radiation projector as a light source. In addition, sheet-like resins cured by the exposure with the ultraviolet beam using the ultraviolet radiation projector as a light source are sequentially stacked to form a desired high-precision three-dimensional image.
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