发明授权
US5111258A Semiconductor device with a multi-stepped source region and method for producing the same 失效
具有多级源极区域的半导体器件及其制造方法

Semiconductor device with a multi-stepped source region and method for
producing the same
摘要:
A semiconductor device includes a first region, a well-shaped second region formed in the first region and a third region formed in the well-shaped second region. Both the first region and the third region have a first conductive type, the well-shaped second region has a second conductive type. A gate electrode is formed on a channel of the well-shaped second region. The channel is sandwiched between the first region and the third region. According to the present invention, the depth of the third region is very deep in a portion near the channel and is very shallow in a portion far from the channel. A resistance of the well-shaped second region near a portion of the third region far from the channel is lower than near the portion of the third region near the channel.
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