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US5124233A Photoresist compositions 失效
光电组合物

Photoresist compositions
摘要:
Positive-working photoresist compositions containing(a) an epoxide resin which can be hardened by heat,(b) a latent urea or imidazole hardener for the component (a) and(c) an iron-arene complex of the formula (I)[R.sup.1 (Fe.sup.II R.sup.2).sub.n ].sub.m.sup.+n [X].sub.n.sup.-m(I) in which n is 1 or 2, m is 1, 2, 3, 4 or 5, X is a non-nucleophilic anion, R.sup.1 is a .pi.-arene and R.sup.2 is an anion of a .pi.-arene, are described.These compositions are distinguished by good properties towards heat and chemicals and require short exposure times.
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