发明授权
- 专利标题： Corrosion resistant thermal treating apparatus
- 专利标题（中）： 耐腐蚀热处理设备
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申请号： US543491申请日： 1990-06-26
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公开(公告)号： US5131842A公开(公告)日： 1992-07-21
- 发明人: Shinji Miyazaki , Katushin Miyagi , Mituaki Komino
- 申请人： Shinji Miyazaki , Katushin Miyagi , Mituaki Komino
- 申请人地址： JPX Kawasaki JPX Kanagawa
- 专利权人： Kabushiki Kaisha Toshiba,Tokyo Electron Sagami Limited
- 当前专利权人： Kabushiki Kaisha Toshiba,Tokyo Electron Sagami Limited
- 当前专利权人地址： JPX Kawasaki JPX Kanagawa
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; C23C16/44 ; C30B25/14 ; C30B31/16 ; F27B17/00 ; H01L21/205 ; H01L21/22 ; H01L21/3065 ; H01L21/31
摘要：
A thermal treating apparatus includes a reaction tube having an opening end and storing an object to be treated, an annular manifold arranged at the opening end and having an inlet for supplying a gas to the reaction tube and an outlet for exhausting the gas from the reaction tube, and a cover arranged on the opening end of the manifold. The surfaces of the annular manifold and the cover exposed to the inside of the reaction tube are covered by a material which is not corroded by the gas supplied to the reaction tube.
公开/授权文献
- US5605089A Coffee cup 公开/授权日：1997-02-25
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