公开(公告)号：US5131842A

公开(公告)日：1992-07-21

申请号：US543491

申请日：1990-06-26

申请人： Shinji Miyazaki ,  Katushin Miyagi ,  Mituaki Komino

发明人： Shinji Miyazaki ,  Katushin Miyagi ,  Mituaki Komino

IPC分类号： H01L21/302 ,  C23C16/44 ,  C30B25/14 ,  C30B31/16 ,  F27B17/00 ,  H01L21/205 ,  H01L21/22 ,  H01L21/3065 ,  H01L21/31

CPC分类号： F27B17/0025 ,  C23C16/44 ,  C30B25/14 ,  C30B31/16

摘要： A thermal treating apparatus includes a reaction tube having an opening end and storing an object to be treated, an annular manifold arranged at the opening end and having an inlet for supplying a gas to the reaction tube and an outlet for exhausting the gas from the reaction tube, and a cover arranged on the opening end of the manifold. The surfaces of the annular manifold and the cover exposed to the inside of the reaction tube are covered by a material which is not corroded by the gas supplied to the reaction tube.

摘要翻译： 热处理装置包括具有开口端并存储待处理物体的反应管，设置在开口端的环形歧管，并具有用于向反应管供应气体的入口和用于从反应中排出气体的出口 管和布置在歧管的开口端上的盖。 暴露于反应管内部的环形歧管和盖的表面被不被供应到反应管的气体腐蚀的材料覆盖。

公开(公告)号：US5048800A

公开(公告)日：1991-09-17

申请号：US563345

申请日：1990-08-07

申请人： Shinji Miyazaki ,  Takahiko Moriya ,  Yasushi Yagi ,  Mituaki Komino ,  Katuhiko Iwabuchi

发明人： Shinji Miyazaki ,  Takahiko Moriya ,  Yasushi Yagi ,  Mituaki Komino ,  Katuhiko Iwabuchi

IPC分类号： C23C16/54 ,  C30B25/10 ,  C30B31/12 ,  F27B17/00 ,  F27D1/00 ,  H01L21/00

CPC分类号： H01L21/67115 ,  C23C16/54 ,  C30B25/10 ,  C30B31/12 ,  F27B17/0025 ,  F27D1/0033

摘要： A vertical heat treatment apparatus includes a reaction furnace constituted by a reaction chamber having an inner tube and an outer tube and a heater arranged outside the reaction chamber, a manifold communicating with a lower portion of the reaction chamber to support the reaction chamber and a gas being supplied and exhausted through the mainfold, a hollow vessel, arranged together with the boat in the reaction furnace, for supporting a lower end of a boat having objects, and a plurality of first heat-insulating members detachably arranged in the hollow vessel, wherein the number of the first insulating members is adjusted to adjust a heat-insulating effect. The first heat-insulating member includes a fin unit constituted by fins horizontally arranged at predetermined intervals and spacers for keeping the intervals between the fins.

摘要翻译： 立式热处理装置包括由反应室构成的反应炉，该反应室具有内管和外管以及布置在反应室外部的加热器，与反应室的下部连通以支撑反应室的歧管和气体 通过主折叠供应和排出的中空容器，与反应炉中的船一起布置的用于支撑具有物体的船的下端的中空容器，以及可拆卸地布置在中空容器中的多个第一绝热构件，其中 调整第一绝缘构件的数量以调节绝热效果。 第一绝热构件包括由以预定间隔水平布置的翅片构成的翅片单元和用于保持翅片之间的间隔的间隔件。