发明授权
- 专利标题: Method for manufacturing layers from an oxide-ceramic superconductor material on a substrate using a CVD-process
- 专利标题(中): 使用CVD法在氧化硅陶瓷超导体材料上制造层的方法
-
申请号: US455074申请日: 1989-12-22
-
公开(公告)号: US5140003A公开(公告)日: 1992-08-18
- 发明人: Alfred Mueller
- 申请人: Alfred Mueller
- 申请人地址: DEX Berlin & Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Berlin & Munich
- 优先权: DEX3909406 19890322
- 主分类号: C04B41/87
- IPC分类号: C04B41/87 ; C01B13/14 ; C01G1/00 ; C01G3/00 ; C04B35/45 ; C23C16/30 ; C23C16/40 ; H01B13/00 ; H01L39/24
摘要:
At least one layer from an oxide-ceramic superconductor material with a high transition temperature is produced on a substrate using a CVD-process. As parent materials, at least one vaporizable composition of each of the metallic components of the superconductor material is provided respectively, and these parent compositions are vaporized respectively at a predetermined temperature and with a predetermined partial pressure. In addition, at least one gaseous coreactant is provided, which is reactive with the parent compositions, the parent compositions as well as a minimum of one coreactant are dosed respectively by means of a carrier gas stream and united in a gas mixture with a predetermined mixture ratio, and to form the superconductor material, the conditions of reaction are adjusted using the energy supply for a reaction of or with the parent compositions and a minimum of one coreactant. A gaseous coreactant containing at least ammonia or organic amines is fed to the gas mixture. Gaseous water is advantageously admixed with this coreactant.
公开/授权文献
信息查询