发明授权
- 专利标题: Method of making a microvalve
- 专利标题(中): 制作微孔的方法
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申请号: US566997申请日: 1990-08-13
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公开(公告)号: US5142781A公开(公告)日: 1992-09-01
- 发明人: Michael Mettner , Martin A. Schmidt , Theresa Lober , Michael A. Huff
- 申请人: Michael Mettner , Martin A. Schmidt , Theresa Lober , Michael A. Huff
- 申请人地址: DEX Stuttgart MA Cambridge
- 专利权人: Robert Bosch GmbH,Mass. Inst. of Tech.
- 当前专利权人: Robert Bosch GmbH,Mass. Inst. of Tech.
- 当前专利权人地址: DEX Stuttgart MA Cambridge
- 优先权: DEX3926647 19890811
- 主分类号: F16K7/12
- IPC分类号: F16K7/12 ; F15C5/00 ; F16K7/17 ; F16K31/02 ; F16K99/00 ; H01L41/09 ; H01L41/22
摘要:
A microvalve composed of multiple layers bonded together is distinguished by the fact that all layers are structured only from one side. Prior to bonding of a new layer to the preceding layer, the new layer is homogeneous or unstructured. Only after bonding of the new layer to the preceding layers or wafers is the newly-applied layer provided with a structure, by etching or other profiling method. This simplifies construction, and reduces manufacturing cost, of the microvalve. The valve can be used for either liquid or gaseous media. It is adapted for use, inter alia, as a fuel injection valve or as a pilot control stage of servo-valves used in anti-lock braking systems (ABS). A method of producing a sealed cavity with a residual gas pressure therein, which may have applications other than valve manufacture, is also disclosed.
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