发明授权
- 专利标题: Thermocompression bonding in integrated circuit packaging
- 专利标题(中): 集成电路封装中的热压接
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申请号: US646413申请日: 1991-01-28
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公开(公告)号: US5148261A公开(公告)日: 1992-09-15
- 发明人: Sung K. Kang , Michael J. Palmer , Timothy C. Reiley , Robert D. Topa
- 申请人: Sung K. Kang , Michael J. Palmer , Timothy C. Reiley , Robert D. Topa
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: B23K20/02
- IPC分类号: B23K20/02 ; B23K20/233 ; B23K33/00 ; H01L21/603
摘要:
A contact member for thermocompression bonding in integrated circuit packaging has on a conductor end a uniform texture deformable layer with a hardness value in the range of that of soft gold which is approximately 90 on the Knoop scale and with a rough surface morphology having ridges with approximately 1 micrometer modulation frequency and a depth between ridges of from 1/4 to 1/2 that of the average integrated circuit pad. The deformable layer is produced by plating gold in a strong electronegative plating bath within a range of 0.03 to 0.05 mA/sq.mm. current density. Plating apparatus, for plating different areas, with different electronegative conditions, with separate independently powered anodes, is provided.
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