发明授权
- 专利标题: Article alignment method
- 专利标题(中): 文章对齐方式
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申请号: US691658申请日: 1991-04-26
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公开(公告)号: US5152055A公开(公告)日: 1992-10-06
- 发明人: Leroy D. L'Esperance, III , Hung N. Nguyen , Yiu-Man Wong
- 申请人: Leroy D. L'Esperance, III , Hung N. Nguyen , Yiu-Man Wong
- 申请人地址: NJ Murray Hill
- 专利权人: AT&T Bell Laboratories
- 当前专利权人: AT&T Bell Laboratories
- 当前专利权人地址: NJ Murray Hill
- 主分类号: H01L21/68
- IPC分类号: H01L21/68
摘要:
Alignment of each of a plurality of depending first conductive members (16), in an array of orthogonal rows and columns on an article (12), with a corresponding second conductive member (18) arranged in a like array on a substrate (14), is accomplished by positioning the article in spaced relationship from the substrate. The arrays of first and second conductive members (16,18) are first angularly aligned by rotating the article (12) so that the offset between a first column of first and second conductive members on the article and substrate, respectively, as seen by a television camera (32) at a first end of the article and substrate is the same as the offset between a second column of first and second members on the article and substrate, respectively, at the other end thereof as seen by a second camera (30). Translational alignment of the arrays of first and second conductive members (16,18) is accomplished by displacing the substrate (14) so that the first and second conductive members in the first column on the article and substrate, respectively, are aligned at the same time that the first and second conductive members in the first row of first and second conductive members on the article and substrate, respectively, are aligned.
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