发明授权
- 专利标题: Universal, microfabricated probe for scanning probe microscopes
- 专利标题(中): 通用扫描探针显微镜的微波探测器
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申请号: US701404申请日: 1991-05-13
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公开(公告)号: US5166520A公开(公告)日: 1992-11-24
- 发明人: Craig Prater , Thomas B. Albrecht
- 申请人: Craig Prater , Thomas B. Albrecht
- 申请人地址: CA Oakland
- 专利权人: The Regents of the University of California
- 当前专利权人: The Regents of the University of California
- 当前专利权人地址: CA Oakland
- 主分类号: G01Q70/10
- IPC分类号: G01Q70/10 ; G01Q70/14 ; G01Q70/16 ; H01J37/26
摘要:
A universal probe which can be used with many different types of scanning probe microscopes is disclosed. The probe is mounted on a flexible base. The flexible base may either be a flexible cantilevered beam or a flexible membrane. The probe is a sharply tapered probe and forms in general a squat hollow pyramid or cone. The apex of the pyramid or cone has an aperture defined therethrough with a small controlled diameter of the order of 10 to 50,000 Angstroms. The hollow within the probe is filled with a material chosen according to the type of the scanning probe microscope used and the underlying surface. A signal is coupled to the material in the tip of the probe from the scanning probe microscope to interact with the underlying surface.
公开/授权文献
- US5792698A Method of manufacturing semiconductor light emitting device 公开/授权日:1998-08-11
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