发明授权
- 专利标题: Semiconductor test apparatus
- 专利标题(中): 半导体测试仪
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申请号: US644634申请日: 1991-01-23
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公开(公告)号: US5172047A公开(公告)日: 1992-12-15
- 发明人: Teruhiko Funakura
- 申请人: Teruhiko Funakura
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-228016 19900831
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R31/26 ; G01R31/3193
摘要:
A semiconductor test apparatus for testing the characteristics of a semiconductor device having a plurality of output pins includes a plurality of level determination devices, arranged in correspondence with respective output pins of the semiconductor device, for determining the output levels from corresponding output pins, a data preparation device for preparing combination data by selectively combining the outputs of the plurality of level determination devices, a retaining device for retaining combination data prepared by the data preparation device, at least two storage devices, each for storing set values, at least two comparison devices, arranged in correspondence with respective storage devices, each for comparing combination data retained in the retaining device with the set values stored in the corresponding storage devices, and a determination device for determining the characteristics of the semiconductor devices from the comparison results of the comparison devices.
公开/授权文献
- US5933740A RTP booster to semiconductor device anneal 公开/授权日:1999-08-03
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