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US5172047A Semiconductor test apparatus 失效
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Semiconductor test apparatus
摘要:
A semiconductor test apparatus for testing the characteristics of a semiconductor device having a plurality of output pins includes a plurality of level determination devices, arranged in correspondence with respective output pins of the semiconductor device, for determining the output levels from corresponding output pins, a data preparation device for preparing combination data by selectively combining the outputs of the plurality of level determination devices, a retaining device for retaining combination data prepared by the data preparation device, at least two storage devices, each for storing set values, at least two comparison devices, arranged in correspondence with respective storage devices, each for comparing combination data retained in the retaining device with the set values stored in the corresponding storage devices, and a determination device for determining the characteristics of the semiconductor devices from the comparison results of the comparison devices.
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