发明授权
- 专利标题： Apparatus for measuring the electrical characteristics of a semiconductor wafer
- 专利标题（中）： 用于测量半导体波形的电气特性的装置
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申请号： US614153申请日： 1990-11-16
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公开(公告)号： US5179333A公开(公告)日： 1993-01-12
- 发明人: Shoichi Washizuka , Takao Ohta
- 申请人： Shoichi Washizuka , Takao Ohta
- 申请人地址： JPX Kawasaki
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX1-299254 19891117; JPX2-115491 19900501
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01R31/28 ; H01L21/677
摘要：
A semiconductor wafer evaluation apparatus, wherein a conductivity detector and a carrier mobility detector are independently arranged so that detections can be made under optimum conditions, respectively. A wafer carrying unit is arranged so as to carry or convey a semiconductor wafer on a carrying path between the two detectors. These components are controlled by a controller. A carrier concentration is calculated from the conductivity and the carrier mobility detected by both detectors. When a partition wall for preventing interference of an electromagnetic wave is provided between the conductivity detector and the carrier mobility detector, interference between the two detectors is further reduced.
公开/授权文献
- US4009991A Process for producing carbon fibers 公开/授权日：1977-03-01
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