发明授权
US5187367A Cantilever type probe, scanning tunneling microscope and information
processing device equipped with said probe
失效
CANTILEVER类型探头,扫描隧道显微镜以及装有探头的信息处理装置
- 专利标题: Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe
- 专利标题(中): CANTILEVER类型探头,扫描隧道显微镜以及装有探头的信息处理装置
-
申请号: US742436申请日: 1991-08-08
-
公开(公告)号: US5187367A公开(公告)日: 1993-02-16
- 发明人: Toshihiko Miyazaki , Hiroyasu Nose , Takayuki Yagi , Toshimitsu Kawase , Katsuhiko Shinjo
- 申请人: Toshihiko Miyazaki , Hiroyasu Nose , Takayuki Yagi , Toshimitsu Kawase , Katsuhiko Shinjo
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-213765 19900814; JPX2-251452 19900919
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; G01N27/00 ; G01Q20/04 ; G01Q60/16 ; G01Q70/10 ; G01Q70/14 ; G01Q80/00 ; G11B9/00 ; G11B11/00 ; H01L41/09
摘要:
A cantilever type probe comprises a cantilever-shaped displacement element having electrodes for driving which displace two layers of piezoelectric material at the interface and first and second surfaces of the layers, respectively, and each of the electrodes being arranged separately within the same plane, and a tip for information input and output connected to electrodes for drawing out arranged separately from the electrodes for driving at the free end of either one of the first and second surfaces of the element. A scanning tunneling microscopy or an information processing device comprises the cantilever type probe, a driver for driving the displacement element of the cantilever type probe and a bias or pulse voltage applicator for applying a bias or pulse voltage between a sample and the probe.
公开/授权文献
- US4824659A Antibody conjugates 公开/授权日:1989-04-25
信息查询