发明授权
US5198322A Positively operating radiation-sensitive mixture containing a
polyfunctional .alpha.-diazo-.beta.-keto ester and radiation-sensitive
recording material containing this mixture
失效
含有多官能(ALPHA)-DIAZO-(BETA)-KETO ESTER和含有该混合物的辐射敏感记录材料的正确操作的辐射敏感性混合物
- 专利标题: Positively operating radiation-sensitive mixture containing a polyfunctional .alpha.-diazo-.beta.-keto ester and radiation-sensitive recording material containing this mixture
- 专利标题(中): 含有多官能(ALPHA)-DIAZO-(BETA)-KETO ESTER和含有该混合物的辐射敏感记录材料的正确操作的辐射敏感性混合物
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申请号: US466007申请日: 1990-01-12
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公开(公告)号: US5198322A公开(公告)日: 1993-03-30
- 发明人: Peter Wilharm , Hans-Joachim Merrem , Georg Pawlowski , Ralph Dammel
- 申请人: Peter Wilharm , Hans-Joachim Merrem , Georg Pawlowski , Ralph Dammel
- 申请人地址: DEX Frankfurt am Main
- 专利权人: Hoechst Aktiengesellschaft
- 当前专利权人: Hoechst Aktiengesellschaft
- 当前专利权人地址: DEX Frankfurt am Main
- 优先权: DEX3900736 19890112
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; A61K8/00 ; A61Q17/04 ; C07C245/18 ; C07C271/10 ; C07C271/20 ; C07C271/24 ; C07C275/10 ; C07C275/26 ; C07C275/32 ; C07C275/40 ; C07C323/12 ; C07D209/48 ; C07D251/34 ; C07D295/14 ; C08F2/50 ; C09K3/00 ; G03C1/52 ; G03F7/004 ; G03F7/016 ; H01L21/027 ; H01L21/30
摘要:
A positively operating radiation-sensitive mixture comprising a binder which is insoluble in water but soluble or at least swellable in aqueous alkaline solution, and as a photoactive component a polyfunctional .alpha.-diazo-.beta.-keto ester of the general formula I ##STR1## in which R.sup.1 denotes an aliphatic, cycloaliphatic or araliphatic or aromatic radical having 4 to 20 carbon atoms, in which individual CH.sub.2 groups can be replaced by oxygen or sulfur atoms or by ##STR2## or NH groups and/or contain keto groups, X denotes an aliphatic, cycloaliphatic, carbocyclic, heterocyclic or araliphatic radical having 2 to 22 carbon atoms, in which individual CH.sub.2 groups can be replaced by oxygen or sulfur atoms or by the groups --NR.sup.2 --, --C(O)--O--, --C(O)--NR.sup.2 --, --C(O)-- ##STR3## --NR.sup.2 --C(O)--NR.sup.3 --, --O--C(O)--NR.sup.2 --, --C(O)-- ##STR4## or --O--C(O)--O--, or CH groups can be replaced by ##STR5## in which R.sup.2 and R.sup.3 independently of one another represent hydrogen or an aliphatic, carbocyclic or araliphatic radical,m denotes an integer from 2 to 10 andn denotes an integer from 0 to 2, whereinm-n is .gtoreq.2,is described.The radiation-sensitive mixture is particularly suitable for exposure using radiation of wavelength 190 to 300 nm.
公开/授权文献
- US4581765A Information security system 公开/授权日:1986-04-08
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