发明授权
- 专利标题： Vacuum-treatment apparatus
- 专利标题（中）： 真空处理设备
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申请号： US835331申请日： 1992-02-14
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公开(公告)号： US5203981A公开(公告)日： 1993-04-20
- 发明人: Moriaki Akazawa
- 申请人： Moriaki Akazawa
- 申请人地址： JPX Tokyo
- 专利权人： Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人： Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-133905 19910605
- 主分类号： C23C16/44
- IPC分类号： C23C16/44 ; C23C16/458 ; C23F4/00 ; H01J37/32 ; H01L21/203 ; H01L21/205 ; H01L21/285 ; H01L21/302 ; H01L21/3065 ; H01L21/687
摘要：
A vacuum-treatment apparatus employs a magnetically driven clamp which uses repulsive and attractive forces between magnets. The clamp mechanism is simplified, maintenance of the apparatus can be easily performed, and the surfaces which mechanically contact one another are decreased as much as possible so that a vacuum-treatment apparatus which generates less dust is obtained.
公开/授权文献
- US5807155A Picture display plush toy 公开/授权日：1998-09-15