发明授权
US5221415A Method of forming microfabricated cantilever stylus with integrated
pyramidal tip
失效
形成集成金字塔尖端的微型悬臂式触控笔的方法
- 专利标题： Method of forming microfabricated cantilever stylus with integrated pyramidal tip
- 专利标题（中）： 形成集成金字塔尖端的微型悬臂式触控笔的方法
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申请号： US618054申请日： 1990-11-26
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公开(公告)号： US5221415A公开(公告)日： 1993-06-22
- 发明人: Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
- 申请人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
- 申请人地址： CA Stanford
- 专利权人： Board of Trustees of the Leland Stanford Junior University
- 当前专利权人： Board of Trustees of the Leland Stanford Junior University
- 当前专利权人地址： CA Stanford
- 主分类号： B81C1/00
- IPC分类号： B81C1/00 ; G01Q70/10 ; G01Q70/14 ; G01Q70/16 ; H01L21/306
摘要：
A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.
公开/授权文献
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