The disclosure relates to a metal oxide film formed on a glass substrate by the sol-gel process using an alcohol solution of at least one metal alkoxide or acetylacetonato. To afford water repellency to the oxide film, carbon fluoride is dispersed in the metal oxide matrix by thermal decomposition of a fluoroalkylsilane compound, e.g. CF.sub.3 (CF.sub.2).sub.3 CH.sub.2 CH.sub.2 Si(OCH.sub.3).sub.3. An organic polymer, e.g. polyethylene glycol, is dissolved in the metal alkoxide or acetylacetonato solution, and the solution is applied to the glass substrate to form a sol film. By heating at a temperature not higher than 200.degree. C. the sol film turns into a porous gel film. Next, the porous gel film is impregnated with an alcohol solution of the fluoroalkylsilane compound and then heated at a temperature not lower than 500.degree. C. The obtained oxide film is good in durability and abrasion resistance, and on this film the contact angle of water drop becomes greater than 90 degrees.