发明授权
US5268989A Multi zone illuminator with embeded process control sensors and light
interference elimination circuit
失效
具有嵌入式过程控制传感器和光干扰消除电路的多区域照明器
- 专利标题： Multi zone illuminator with embeded process control sensors and light interference elimination circuit
- 专利标题（中）： 具有嵌入式过程控制传感器和光干扰消除电路的多区域照明器
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申请号： US870446申请日： 1992-04-16
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公开(公告)号： US5268989A公开(公告)日： 1993-12-07
- 发明人: Mehrdad M. Moslehi , Robert Matthews , Cecil J. Davis
- 申请人： Mehrdad M. Moslehi , Robert Matthews , Cecil J. Davis
- 申请人地址： TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： TX Dallas
- 主分类号： H01L21/26
- IPC分类号： H01L21/26 ; G01J5/00 ; H01L21/00 ; H01L21/324 ; C23C16/48 ; H05B3/00
摘要：
A multi-zone illuminator for processing semiconductor wafers comprises a plurality of source lamps and dummy lamps embedded in the reflector side of a lamp housing. The source lamps are arranged in a plurality of concentric circular zones. The illuminator also comprises plurality of light pipes for receiving multi-point temperature sensors to measure the semiconductor wafer temperature and its distribution uniformity. A gold-plated reflector plate is attached to the bottom side of the lamp housing for reflecting and directing optical energy toward the wafer surface. The distance between the reflector plate and the wafer and the lamps and the wafer may be adjusted with the use of a spacial elevator and adaptor assembly. The multi-zone illuminator allows uniform wafer heating during both transient and steady-state wafer heating cycles.
公开/授权文献
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