发明授权
US5291775A Scanning force microscope with integrated optics and cantilever mount
失效
具有集成光学和悬臂安装的扫描力显微镜
- 专利标题： Scanning force microscope with integrated optics and cantilever mount
- 专利标题（中）： 具有集成光学和悬臂安装的扫描力显微镜
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申请号： US845919申请日： 1992-03-04
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公开(公告)号： US5291775A公开(公告)日： 1994-03-08
- 发明人: Ronald C. Gamble , Paul G. West
- 申请人： Ronald C. Gamble , Paul G. West
- 申请人地址： CA Santa Clara
- 专利权人： Topometrix
- 当前专利权人： Topometrix
- 当前专利权人地址： CA Santa Clara
- 主分类号： G01B11/30
- IPC分类号： G01B11/30 ; B01L7/00 ; G01B7/34 ; G01B21/30 ; G01N37/00 ; G01Q10/00 ; G01Q20/02 ; G01Q30/14 ; G01Q60/24 ; G01Q70/02 ; H01J37/28 ; G01B5/28 ; G01N23/00
摘要：
The scanning force microscope includes integrated optics for viewing the optical lever arm, probe and sample to be examined. The scanning force microscope includes an improved mount for the probe, which is magnetically secured to the body of the scanning force microscope, to improve ease of handling and mounting the probe assembly. In one preferred embodiment the scanning force microscope, also includes a base portion with a fluid cell for receiving a sample in a sealed gas or liquid environment.
公开/授权文献
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