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1.发明授权Scanning probe microscope apparatus for use in a scanning electron microscope 失效用于扫描电子显微镜的扫描探针显微镜装置
公开(公告)号：US5510615A
公开(公告)日：1996-04-23
申请号：US478479
申请日：1995-06-07
申请人： Huddee Ho , Paul E. West
发明人： Huddee Ho , Paul E. West
CPC分类号： G01Q30/02 , B82Y35/00 , G01Q30/18 , G01Q70/02 , H01J37/28 , H01J2237/2818 , Y10S977/86
摘要： The scanning probe microscope translation apparatus includes a scanning probe microscope for examining a specimen, with a specimen stage for mounting the specimen for examination by the scanning probe microscope, and a first translator mounted to the scanning probe microscope for translating the specimen stage relative to the scanning probe microscope. A support frame is dimensioned and adapted to be mounted in a specimen chamber of a scanning electron microscope, and a second translator is provided for scanning the scanning probe microscope relative to the support frame. The second translator is mounted on dual mass plates provided for isolating the scanning probe microscope from external vibrations, and suspension device are provided for suspending the mass plates from the support frame. A vacuum load lock system permits moving the scanning probe microscope, specimen stage, first translator, and mounting assembly into and out of the vacuum of the scanning electron microscope vacuum chamber.
摘要翻译： 扫描探针显微镜转印装置包括用于检查样本的扫描探针显微镜，具有用于通过扫描探针显微镜安装用于检查的样本的样本台和安装到扫描探针显微镜上的第一平移器，用于将样本台相对于 扫描探针显微镜。 支撑框架尺寸适于安装在扫描电子显微镜的样本室中，并且提供第二平移器用于相对于支撑框架扫描扫描探针显微镜。 第二个翻译器安装在双重质量板上，用于将扫描探针显微镜与外部振动隔离，并提供悬挂装置，用于将质量板从支撑架悬挂下来。 真空负载锁定系统允许将扫描探针显微镜，样品台，第一平移器和安装组件移入和移出扫描电子显微镜真空室的真空。
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公开(公告)号：US5260622A
公开(公告)日：1993-11-09
申请号：US765082
申请日：1991-09-24
申请人： Paul E. West
发明人： Paul E. West
摘要： The electromechanical translation apparatus includes a translation drive assembly having front and rear drive leg members coupled together with central extension piezoelectric members, and piezoelectric clamping members which clamp the drive leg members between opposing bearing members of a lower base. The translation drive assembly may directly carry an object for precise positioning of the object, or may carry an upper movable base which in turn may be translated along an axis perpendicular to the direction of movement along the lower base, so that an object placed upon the upper movable base can be precisely positioned.
摘要翻译： 机电平移装置包括平移驱动组件，其具有与中心延伸压电部件联接在一起的前驱动支腿部件和后驱动支腿部件，以及将驱动支腿部件夹在下基板的相对轴承部件之间的压电夹紧部件。 平移驱动组件可以直接携带用于物体精确定位的物体，或者可以承载上部可移动基座，该上部可移动基座又可以沿着沿着下部基座的沿着移动方向的轴线平移，使得放置在 上可移动底座可以精确定位。
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3.发明授权
公开(公告)号：US5441343A
公开(公告)日：1995-08-15
申请号：US127661
申请日：1993-09-27
申请人： Russell J. Pylkki , Marc Schuman , Paul E. West
发明人： Russell J. Pylkki , Marc Schuman , Paul E. West
CPC分类号： G01Q60/58 , B82Y35/00 , G01N25/72 , Y10S977/852 , Y10S977/867
摘要： The scanning thermal probe microscope measures a thermal parameter such as thermal conductivity or temperature of surface contours of a specimen with a thermal sensor maintained in thermal communication with the surface of the specimen and maintained at a temperature different than that of the specimen. The thermal sensor is disposed on the free end of a cantilever arm in thermal communication with the probe. A thermal feedback bridge circuit can maintain the thermal sensor at a constant temperature by heating or cooling the sensor, and provides a signal for determining the heat transfer between the probe and the specimen. The cantilever arm includes first and second legs of electrically conductive material, and the thermal sensor comprises a narrowed portion of the conducting material having a relatively high temperature coefficient of resistance.
摘要翻译： 扫描热探针显微镜测量热参数，例如具有与样品表面热连通的热传感器的样品的表面轮廓的热导率或温度，并保持在与样品不同的温度。 热传感器设置在与探头热连通的悬臂的自由端上。 热反馈桥接电路可以通过加热或冷却传感器来将热传感器保持在恒定温度，并提供一个信号来确定探头和样品之间的传热。 悬臂包括导电材料的第一和第二支脚，并且热传感器包括具有相对高的电阻温度系数的导电材料的变窄部分。
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公开(公告)号：US5406832A
公开(公告)日：1995-04-18
申请号：US86592
申请日：1993-07-02
申请人： Ronald C. Gamble , Paul E. West , Marc R. Schuman
发明人： Ronald C. Gamble , Paul E. West , Marc R. Schuman
CPC分类号： G01Q10/06 , B82Y35/00 , Y10S977/85 , Y10S977/851
摘要： The synchronous sampling scanning force microscope includes a reflective cantilever arm having a free end which is oscillated at a frequency different from the resonance frequency of the cantilever arm. The motion of the oscillating cantilever arm is measured, to generate a deflection signal indicative of the amplitude of deflection or phase shift of the cantilever arm. Selected portions of cycles of the output signal are sampled, for generating output signal data indicative of deflection of the near and far excursions of the probe. The method and apparatus permit monitoring of compliance of the surface of the specimen by multiple sampling at a rate greater than the period of oscillation of the cantilever probe of the microscope.
摘要翻译： 同步采样扫描力显微镜包括反射悬臂，其具有以与悬臂的共振频率不同的频率振荡的自由端。 测量振荡悬臂的运动，以产生指示悬臂的偏转或相移幅度的偏转信号。 对输出信号的周期的选定部分进行采样，以产生指示探针的近距离和远距偏移的输出信号数据。 该方法和装置允许以大于显微镜的悬臂探头的振荡周期的速率进行多次采样来监测样品表面的顺应性。
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公开(公告)号：US5469734A
公开(公告)日：1995-11-28
申请号：US357133
申请日：1994-12-15
申请人： Marc R. Schuman
发明人： Marc R. Schuman
CPC分类号： G01Q40/00 , B82Y35/00 , Y10S977/851
摘要： The scanning apparatus linearization and calibration system includes an electromechanical scanner having a sample stage portion, and a deflecting member, mounted between the scanning means and a fixed mounting member, that undergoes deflection in response to displacement of the scanner sample stage portion in at least one dimension of displacement. Strain gauges are mounted to the deflecting member for measuring the deflection of the deflecting member and for generating a deflection output signal indicative of an amount of deflection of the deflecting member, to provide a highly sensitive indication of actual displacement of the sample stage of the scanning apparatus. Control circuitry also provides for open loop displacement correction and for closed loop feedback correction of the position of the scanner sample stage.
摘要翻译： 扫描装置线性化和校准系统包括具有样品台部分的机电扫描器和安装在扫描装置和固定安装构件之间的偏转构件，其响应于扫描仪样品台部分在至少一个中的位移而经历偏转 位移尺寸 应变计被安装到偏转构件，用于测量偏转构件的偏转并产生指示偏转构件的偏转量的偏转输出信号，以提供扫描样本台的实际位移的高度敏感指示 仪器。 控制电路还提供开环位移校正和用于扫描仪样品台位置的闭环反馈校正。
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公开(公告)号：US5291775A
公开(公告)日：1994-03-08
申请号：US845919
申请日：1992-03-04
申请人： Ronald C. Gamble , Paul G. West
发明人： Ronald C. Gamble , Paul G. West
IPC分类号： G01B11/30 , B01L7/00 , G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/00 , G01Q20/02 , G01Q30/14 , G01Q60/24 , G01Q70/02 , H01J37/28 , G01B5/28 , G01N23/00
摘要： The scanning force microscope includes integrated optics for viewing the optical lever arm, probe and sample to be examined. The scanning force microscope includes an improved mount for the probe, which is magnetically secured to the body of the scanning force microscope, to improve ease of handling and mounting the probe assembly. In one preferred embodiment the scanning force microscope, also includes a base portion with a fluid cell for receiving a sample in a sealed gas or liquid environment.
摘要翻译： 扫描力显微镜包括用于观察光学杠杆臂，探针和待检测样品的集成光学器件。 扫描力显微镜包括用于探针的改进的安装件，其被磁性地固定到扫描力显微镜的主体，以提高操纵和安装探针组件的容易性。 在一个优选实施例中，扫描力显微镜还包括具有用于在密封气体或液体环境中接收样品的流体池的基部。
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公开(公告)号：US5681987A
公开(公告)日：1997-10-28
申请号：US631555
申请日：1996-04-12
申请人： Ronald C. Gamble
发明人： Ronald C. Gamble
IPC分类号： G01Q60/52 , G01B11/30 , G01B21/30 , G01R31/303
CPC分类号： G01Q60/34 , B82Y35/00 , G01Q20/02 , Y10S977/85 , Y10S977/873
摘要： The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is maintained in substantially constant contact with the surface of the specimen. The motion of the free end of the cantilever arm is measured, to generate a deflection signal indicative of the amount of actual deflection of the probe tip. The method and apparatus permit high speed scans and real time imaging of the surface of a specimen with a substantial reduction in noise normally arising due to tip-surface interaction and acoustic noise.
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公开(公告)号：US5641897A
公开(公告)日：1997-06-24
申请号：US560827
申请日：1995-11-20
申请人： Marc Robert Schuman
发明人： Marc Robert Schuman
CPC分类号： G01Q40/00 , B82Y35/00 , Y10S977/851
摘要： The scanning apparatus linearization and calibration system includes an electromechanical scanner having a sample stage portion, and a deflecting member, mounted between the scanning means and a fixed mounting member, that undergoes deflection in response to displacement of the scanner sample stage portion in at least one dimension of displacement. Strain gauges are mounted to the deflecting member for measuring the deflection of the deflecting member and for generating a deflection output signal indicative of an amount of deflection of the deflecting member, to provide a highly sensitive indication of actual displacement of the sample stage of the scanning apparatus. Control circuitry also provides for open loop displacement correction and for closed loop feedback correction of the position of the scanner sample stage.
摘要翻译： 扫描装置线性化和校准系统包括具有样品台部分的机电扫描器和安装在扫描装置和固定安装构件之间的偏转构件，其响应于扫描仪样品台部分在至少一个中的位移而经历偏转 位移尺寸 应变计被安装到偏转构件，用于测量偏转构件的偏转并产生指示偏转构件的偏转量的偏转输出信号，以提供扫描样本台的实际位移的高度敏感指示 仪器。 控制电路还提供开环位移校正和用于扫描仪样品台位置的闭环反馈校正。
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公开(公告)号：US5481908A
公开(公告)日：1996-01-09
申请号：US55236
申请日：1993-04-28
申请人： Ronald C. Gamble
发明人： Ronald C. Gamble
CPC分类号： G01Q60/34 , B82Y35/00 , G01Q20/02 , Y10S977/851
摘要： The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is maintained in substantially constant contact with the surface of the specimen. The motion of the free end of the cantilever arm is measured, to generate a deflection signal indicative of the amount of actual deflection of the probe tip. The method and apparatus permit high speed scans and real time imaging of the surface of a specimen with a substantial reduction in noise normally arising due to tip-surface interaction and acoustic noise.
摘要翻译： 共振接触扫描力显微镜包括以悬臂的谐振频率的高谐波振荡的反射悬臂，同时探针头保持与试样的表面基本恒定接触。 测量悬臂的自由端的运动，以产生指示探针尖端的实际偏转量的偏转信号。 该方法和装置允许通过尖端表面相互作用和声学噪声通常产生的噪声的显着降低来高速扫描和样品表面的实时成像。
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公开(公告)号：US5625142A
公开(公告)日：1997-04-29
申请号：US500544
申请日：1995-07-11
申请人： Ronald C. Gamble
发明人： Ronald C. Gamble
CPC分类号： G01Q60/34 , B82Y35/00 , G01Q20/02 , Y10S977/851
摘要： The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is maintained in substantially constant contact with the surface of the specimen. The motion of the free end of the cantilever arm is measured, to generate a deflection signal indicative of the amount of actual deflection of the probe tip. The method and apparatus permit high speed scans and real time imaging of the surface of a specimen with a substantial reduction in noise normally arising due to tip-surface interaction and acoustic noise.
摘要翻译： 共振接触扫描力显微镜包括以悬臂的谐振频率的高谐波振荡的反射悬臂，同时探针头保持与试样的表面基本恒定接触。 测量悬臂的自由端的运动，以产生指示探针尖端的实际偏转量的偏转信号。 该方法和装置允许通过尖端表面相互作用和声学噪声通常产生的噪声的显着降低来高速扫描和样品表面的实时成像。
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