发明授权
US5296330A Positive photoresists containing quinone diazide photosensitizer,
alkali-soluble resin and tetra(hydroxyphenyl) alkane additive
失效
含有醌二叠氮敏感剂,碱溶性树脂和四(羟基苯基)烷烃添加剂的正型光致抗蚀剂
- 专利标题: Positive photoresists containing quinone diazide photosensitizer, alkali-soluble resin and tetra(hydroxyphenyl) alkane additive
- 专利标题(中): 含有醌二叠氮敏感剂,碱溶性树脂和四(羟基苯基)烷烃添加剂的正型光致抗蚀剂
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申请号: US932128申请日: 1992-08-15
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公开(公告)号: US5296330A公开(公告)日: 1994-03-22
- 发明人: Reinhard Schulz , Norbert Munzel , Martin Roth , Wilhelm Knobloch
- 申请人: Reinhard Schulz , Norbert Munzel , Martin Roth , Wilhelm Knobloch
- 申请人地址: NY Ardsley NJ West Patterson
- 专利权人: Ciba-Geigy Corp.,OCG Microelectronics Inc.
- 当前专利权人: Ciba-Geigy Corp.,OCG Microelectronics Inc.
- 当前专利权人地址: NY Ardsley NJ West Patterson
- 优先权: CHX2550/91 19910830; CHX413/92 19920212
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C07C39/15 ; C07C309/71 ; C07C309/76 ; C08K5/42 ; C08L101/00 ; G03F7/022 ; H01L21/027 ; H05K3/00 ; G03F7/023 ; G03C1/61
摘要:
Positive photoresist compositions comprising, in an organic solvent, at leasta) one alkali-soluble resin,b) one photosensitive quinone diazide,c) one aromatic hydroxy compound of formula I ##STR1## wherein each R is --H, C.sub.1 -C.sub.4 alkyl, C.sub.1 -C.sub.4 alkoxy, --OCH.sub.2 C.sub.6 H.sub.5, --OC.sub.6 H.sub.5 or --COOC.sub.1 -C.sub.4 alkyl, and R.sub.1 and R.sub.2 are each independently of the other H, C.sub.1 -C.sub.4 alkyl, --C.sub.6 H.sub.5 or a cycloaliphatic 5- or 6-membered ring, a is an integer from 0 to 4, and m and n are each independently of the other 0, 1 or 2, which compound enhances the photosensitivity and/or the rate of development, and optionallyd) additional customary modifiers,are eminently suitable for making relief structures.
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