发明授权
- 专利标题： Vacuum coating installation
- 专利标题（中）： 真空镀膜安装
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申请号： US924149申请日： 1992-08-03
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公开(公告)号： US5302208A公开(公告)日： 1994-04-12
- 发明人: Helmut Grimm , Thomas Krug , Andreas Meier , Klemens Ruebsam , Gerhard Steiniger , Mika Gamo , Mamoru Sekiguchi , Mitsuru Kano , Hiroyuki Yasujima , Takashi Miyamoto , Noboru Sasaki
- 申请人： Helmut Grimm , Thomas Krug , Andreas Meier , Klemens Ruebsam , Gerhard Steiniger , Mika Gamo , Mamoru Sekiguchi , Mitsuru Kano , Hiroyuki Yasujima , Takashi Miyamoto , Noboru Sasaki
- 申请人地址： DEX Hanau JPX Tokyo
- 专利权人： Leybold Aktiengesellschaft,Toppan Printing Co., Ltd
- 当前专利权人： Leybold Aktiengesellschaft,Toppan Printing Co., Ltd
- 当前专利权人地址： DEX Hanau JPX Tokyo
- 优先权： DEX4203632 19920208
- 主分类号： C23C14/24
- IPC分类号： C23C14/24 ; C23C14/32 ; C23C14/56 ; H01J37/305 ; H01J37/32 ; C23C14/28 ; C23C14/30
摘要：
The invention relates to a vacuum coating installation comprising a container (9) in which is disposed the material (10) to be vaporized, for example SiO. The vaporization of the material (10) herein takes place by means of an electron beam gun (11) or by means of a vaporization oven. Opposing the surface of the material to be vaporized (10) is provided a synthetic film (5) to be coated which is transported further by means of a transport arrangement (4, 6, 22 to 27). Into the space between the material (10) to be vaporized and the material (5) to be coated a microwave is irradiated from an horn antenna (13).
公开/授权文献
- US6063982A Personal hygiene articles for absorbing fluids 公开/授权日：2000-05-16
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