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    Apparatus for the continuous coating of band-type substrate
    3.
    发明授权
    Apparatus for the continuous coating of band-type substrate 失效
    用于连续涂布带状基材的装置

    公开(公告)号：US5242500A

    公开(公告)日：1993-09-07

    申请号：US885079

    申请日：1992-05-18

    申请人： Bjoern Elvers ,  Klemens Ruebsam ,  Jochen Heinz ,  Georg Harwarth ,  Ulrich Reibold ,  Norbert Ross ,  Helmut Grimm

    发明人： Bjoern Elvers ,  Klemens Ruebsam ,  Jochen Heinz ,  Georg Harwarth ,  Ulrich Reibold ,  Norbert Ross ,  Helmut Grimm

    IPC分类号： C23C14/56

    CPC分类号： C23C14/562

    摘要： An apparatus for the continuous coating of band-type substrates in a vacuum chamber comprises a plurality of evaporation vessels 1, 1', . . . of the same size and configuration. These vessels form a row of evaporation vessels aligned with the direction of movement of the band and are spaced approximately equally apart. All vessels are made of an electrically conductive, ceramic material and can be heated by directly passing a current. Provision is made for a device for the continuous supply of wire to be evaporated to the evaporator vessels. The individual evaporator vessels 1, 1', . . . of the row are offset with respect to one another. Together, they cover a small coating zone B which extends transversely to the direction of movement A of the band.

    摘要翻译： 用于在真空室中连续涂覆带状基底的装置包括多个蒸发容器1,1'。 。 。 具有相同的尺寸和配置。 这些容器形成一排与带的移动方向对准的蒸发容器，并且间隔开大致相等。 所有容器均由导电陶瓷材料制成，可直接通过电流加热。 规定了用于连续供应待蒸发到蒸发器容器的电线的装置。 单个蒸发器容器1,1'，。 。 。 的行相对于彼此偏移。 它们一起覆盖横向于带的运动方向A的小涂层区B。

    Series evaporator for vacuum vapor-deposition apparatus
    4.
    发明授权
    Series evaporator for vacuum vapor-deposition apparatus 失效
    真空蒸镀装置系列蒸发器

    公开(公告)号：US5068915A

    公开(公告)日：1991-11-26

    申请号：US574596

    申请日：1990-08-29

    申请人： Jochen Heinz ,  Thomas Krug ,  Klemens Ruebsam ,  Hans Kessler

    发明人： Jochen Heinz ,  Thomas Krug ,  Klemens Ruebsam ,  Hans Kessler

    IPC分类号： C23C14/24 ,  C23C14/26

    CPC分类号： C23C14/243 ,  C23C14/26

    摘要： A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator. The supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity are passed through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner. Spring elements 8 apply pressure to the supply lines 4 traversing the support body 6 with play a, b, the action of these spring elements being exerted approximately parallel to the longitudinal extension of the evaporator and pressing the top portions 9 of the supply lines 4 against the front surfaces 10 of the evaporator 5 which they face. The spring elements themselves are held and guided in an insulating manner with respect to the support bodies 6 or are made of an insulating material, and the conducting wires 7 connected to these supply lines 4 are conductors passed through by a coolant or are configured as cooling tubes 11 or cooling pipes running parallel to the conducting wires and discharging into chambers or channels 12 provided in the supply lines 4.

    摘要翻译： 用于真空气相沉积装置的串联蒸发器具有多个蒸发器5，具有单独的功率控制，通过通过支撑在柱状供电线3,4上的电流加热，其中柱状供应管线3,4由 在串联蒸发器的整个长度上延伸的导电支撑体6。 一个极性的供电线3以导电方式连接到支撑体6，而另一极性的供应线4以绝缘方式穿过支撑体6并连接到布置在绝缘的导线7中 方式。 弹簧元件8通过播放a，b向供应线路4施加横穿支撑体6的压力，这些弹簧元件的作用大致平行于蒸发器的纵向延伸并且将供应线路4的顶部9按压 它们面对的蒸发器5的前表面10。 弹簧元件本身相对于支撑体6以绝缘方式被保持和引导，或者由绝缘材料制成，并且连接到这些供应线路4的导线7是导体通过冷却剂或被构造成冷却 管11或冷却管平行于导线延伸并排放到设置在供应管线4中的室或通道12中。