发明授权
- 专利标题: Table moving apparatus
- 专利标题(中): 桌子移动装置
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申请号: US234679申请日: 1988-08-22
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公开(公告)号: US5323712A公开(公告)日: 1994-06-28
- 发明人: Nobutaka Kikuiri
- 申请人: Nobutaka Kikuiri
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX62-211603 19870826
- 主分类号: B23Q1/00
- IPC分类号: B23Q1/00 ; B23Q1/34 ; B23Q1/44 ; B23Q1/48 ; B23Q5/34 ; F16M11/04 ; H01L21/68 ; A47B85/00
摘要:
A table moving apparatus includes a reference table, a object movable holizontally to generate a driving force acting holizontally, a lever member receiving the driving force to swing round a fulcrum and change the driving force to a vertical force, and a movable table receiving the vertical force to move vertically. The height of movable table on the reference table can be made relatively low. Pitching and rolling errors can be reduced. When the ratio of the lever member is of the reduction type, the resolution of the movable table can be made high or good. When the ratio of the lever member is of the enlargement type, the movable range of the movable table can be made large.
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