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29 条记录 (耗时 0.013 秒)

    Monitoring apparatus
    2.
    发明授权
    Monitoring apparatus 失效
    监控装置

    公开(公告)号：US07225111B2

    公开(公告)日：2007-05-29

    申请号：US11110850

    申请日：2005-04-21

    申请人： Kaoru Suzuki ,  Takashi Yoshimi ,  Daisuke Yamamoto ,  Nobuto Matsuhira ,  Nobutaka Kikuiri

    发明人： Kaoru Suzuki ,  Takashi Yoshimi ,  Daisuke Yamamoto ,  Nobuto Matsuhira ,  Nobutaka Kikuiri

    IPC分类号： G06F11/00

    CPC分类号： G08B25/009 ,  G05B2219/45084 ,  G08B13/19623

    摘要： In a monitoring apparatus, a target-object to be monitored is observed by an observing unit and a countermeasure is applied depending on an observed situation. The knowledge and information on the general feature relating to the target-object, the observing method and the countermeasure method are prepared in the storing unit of the monitoring apparatus. The individual knowledge and information relating to the target-object are registered by the user in the storing unit by utilizing the general monitor-knowledge. In the monitor-plan executing unit, the observing method and the countermeasure method of the target-object are planned in accordance with the situation by utilizing the general monitor-knowledge and the individual monitor-knowledge, and the plan is executed.

    摘要翻译： 在监视装置中，由观察单元观察要监视的目标物体，并且根据观察到的情况应用对策。 在监视装置的存储单元中准备关于目标对象的一般特征的知识和信息，观察方法和对策方法。 通过利用一般的监视器知识，用户在存储单元中登记与目标对象有关的个人知识和信息。 在监视计划执行单元中，通过利用一般监视器知识和各个监视器知识，根据情况来计划目标对象的观察方法和对策方法，并执行该计划。

    Exposure apparatus
    5.
    发明授权
    Exposure apparatus 失效
    曝光装置

    公开(公告)号：US5398271A

    公开(公告)日：1995-03-14

    申请号：US184754

    申请日：1994-01-18

    申请人： Jun Nishida ,  Norio Uchida ,  Nobutaka Kikuiri

    发明人： Jun Nishida ,  Norio Uchida ,  Nobutaka Kikuiri

    IPC分类号： G03F7/20 ,  H01L21/027 ,  G21K5/00

    CPC分类号： G03F7/70716 ,  G03F7/7075

    摘要： A exposure apparatus for a semiconductor wafer, a liquid crystal display panel and so on. The exposure apparatus comprises a light source, a holding means and a moving means. The light source exposes a target such as a semiconductor wafer, a liquid crystal display panel and so on. The holding means alternately holds and releases the target. The moving means for moving the holding means includes a table and a shifting means. The table moves in the direction of the light source. The shifting means shifts the holding means toward or against the table.

    摘要翻译： 用于半导体晶片的曝光装置，液晶显示面板等。 曝光装置包括光源，保持装置和移动装置。 光源露出诸如半导体晶片，液晶显示面板等的目标。 保持装置交替地保持和释放目标。 用于移动保持装置的移动装置包括桌子和移动装置。 桌子沿光源的方向移动。 移动装置将保持装置朝向桌子或抵靠桌子移动。

    Inspection apparatus and method
    6.
    发明授权
    Inspection apparatus and method 有权
    检验仪器及方法

    公开(公告)号：US09057711B2

    公开(公告)日：2015-06-16

    申请号：US13307389

    申请日：2011-11-30

    申请人： Hideo Tsuchiya ,  Takafumi Inoue ,  Nobutaka Kikuiri

    发明人： Hideo Tsuchiya ,  Takafumi Inoue ,  Nobutaka Kikuiri

    IPC分类号： H04N7/18 ,  G01N21/956 ,  G01N21/88

    CPC分类号： G01N21/95607 ,  G01N21/8851 ,  G01N2021/95615 ,  G01N2021/95676

    摘要： An inspection apparatus and method, which can perform defect determination and estimate a defect on a mask and the resultant influence on a wafer. Each of the transfer images is reviewed in order of following (1) to (3): (1) when the degree of defect identified in the first comparing unit is at or exceeding a third threshold and an error ratio corresponding to the defect is at or exceeding a fourth threshold; (2) when the degree of a defect identified in the first comparing unit is less than the third threshold, and an error ratio corresponding to the defect is at or exceeding a fourth threshold; and (3) when the degree of a defect identified in the first comparing unit is at or exceeding a third threshold, and an error ratio corresponding to the defect is less than the fourth threshold.

    摘要翻译： 一种检查装置和方法，其可以执行缺陷确定并估计掩模上的缺陷以及对晶片的所得影响。 以下（1）〜（3）的顺序对每个传送图像进行检查：（1）当在第一比较单元中识别的缺陷程度在或超过第三阈值时，并且与缺陷相对应的误差率在 或超过第四阈值; （2）当在第一比较单元中识别的缺陷程度小于第三阈值时，并且与该缺陷相对应的误差率在或超过第四阈值; 以及（3）当第一比较单元中识别的缺陷程度在或超过第三阈值时，并且与缺陷相对应的误差率小于第四阈值。

    XY STAGE APPARATUS
    7.
    发明申请
    XY STAGE APPARATUS 审中-公开
    XY阶段装置

    公开(公告)号：US20100073684A1

    公开(公告)日：2010-03-25

    申请号：US12535055

    申请日：2009-08-04

    申请人： Noboru KOBAYASHI ,  Yoshitaka KOGURE ,  Kenichi TAKAHARA ,  Nobutaka KIKUIRI

    发明人： Noboru KOBAYASHI ,  Yoshitaka KOGURE ,  Kenichi TAKAHARA ,  Nobutaka KIKUIRI

    IPC分类号： G01B11/02

    CPC分类号： G01B11/03 ,  G01B21/045

    摘要： An XY stage apparatus capable of reducing a measurement error due to air fluctuations is provided. The XY stage apparatus includes a stage that moves in the XY directions, a laser interferometer to measure a position of the stage, and a measuring optical path barrel mechanism having a fixed barrel that covers at least a portion of a measuring optical path between the stage and the laser interferometer, is provided on a side of the laser interferometer of the measuring optical path, and is fixed to the laser interferometer and a movable barrel that covers at least a potion of the measuring optical path, is provided on the side of the stage of the measuring optical path, and moves together with movement of the stage, wherein an end of one of the fixed barrel and the movable barrel is inserted into that of the other.

    摘要翻译： 提供能够减少由于空气波动引起的测量误差的XY平台装置。 XY台装置包括在XY方向上移动的台，用于测量台的位置的激光干涉仪，以及具有固定筒的测量光路筒机构，所述固定筒覆盖所述台之间的测量光路的至少一部分 和激光干涉仪设置在测量光路的激光干涉仪的一侧，并且被固定到激光干涉仪和覆盖测量光路的至少一部分的可移动的镜筒，设置在该侧面上 测量光路的阶段，并与舞台的移动一起移动，其中固定镜筒和可移动镜筒中的一个的端部插入到另一个的端部。

    Fuel cell system
    9.
    发明授权
    Fuel cell system 失效
    燃料电池系统

    公开(公告)号：US07264897B2

    公开(公告)日：2007-09-04

    申请号：US10673154

    申请日：2003-09-30

    申请人： Yuusuke Sato ,  Nobutaka Kikuiri

    发明人： Yuusuke Sato ,  Nobutaka Kikuiri

    IPC分类号： H01M8/04

    CPC分类号： H01M8/04208 ,  H01M8/04089 ,  H01M8/0612 ,  H01M8/0668

    摘要： A fuel cell system includes a fuel tank configured to store a fuel at a pressure higher than atmospheric pressure; a vaporizer configured to vaporize the fuel; a reformer configured to reform the vaporized fuel into a hydrogen rich gas; a CO gas removal apparatus configured to remove CO gas in the hydrogen rich gas; and a cell unit configured to generate electricity by allowing the hydrogen rich gas to react with oxygen.

    摘要翻译： 燃料电池系统包括：燃料箱，其构造成储存在大于大气压的压力下的燃料; 构造成蒸发燃料的蒸发器; 重构器，被配置为将蒸发的燃料改造成富氢气体; CO气体去除装置，其构造成除去富氢气体中的CO气体; 以及电池单元，被配置为通过使富氢气体与氧反应而发电。

    Fuel cell system
    10.
    发明申请
    Fuel cell system 失效
    燃料电池系统

    公开(公告)号：US20070111056A1

    公开(公告)日：2007-05-17

    申请号：US11511339

    申请日：2006-08-29

    申请人： Yuusuke Sato ,  Nobutaka Kikuiri

    发明人： Yuusuke Sato ,  Nobutaka Kikuiri

    IPC分类号： H01M8/06 ,  H01M8/04

    CPC分类号： H01M8/04208 ,  H01M8/04089 ,  H01M8/0612 ,  H01M8/0668

    摘要： A fuel cell system includes a fuel tank configured to store a fuel at a pressure higher than atmospheric pressure; a vaporizer configured to vaporize the fuel; a reformer configured to reform the vaporized fuel into a hydrogen rich gas; a CO gas removal apparatus configured to remove CO gas in the hydrogen rich gas; and a cell unit configured to generate electricity by allowing the hydrogen rich gas to react to oxygen.

    摘要翻译： 燃料电池系统包括：燃料箱，其构造成储存在大于大气压的压力下的燃料; 构造成蒸发燃料的蒸发器; 重构器，被配置为将蒸发的燃料改造成富氢气体; CO气体去除装置，其构造成除去富氢气体中的CO气体; 以及电池单元，被配置为通过使富氢气体与氧反应而发电。