发明授权
US5330941A Quartz glass substrate for polysilicon thin film transistor liquid
crystal display
失效
石英玻璃基板用于多晶硅薄膜晶体管液晶显示
- 专利标题: Quartz glass substrate for polysilicon thin film transistor liquid crystal display
- 专利标题(中): 石英玻璃基板用于多晶硅薄膜晶体管液晶显示
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申请号: US912776申请日: 1992-07-13
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公开(公告)号: US5330941A公开(公告)日: 1994-07-19
- 发明人: Susumu Yaba , Shinya Kikugawa , Yukinori Ohta
- 申请人: Susumu Yaba , Shinya Kikugawa , Yukinori Ohta
- 申请人地址: JPX Tokyo
- 专利权人: Asahi Glass Company Ltd.
- 当前专利权人: Asahi Glass Company Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-207486 19910724; JPX3-327149 19911115; JPX3-327150 19911115
- 主分类号: C03B19/14
- IPC分类号: C03B19/14 ; C03C3/06 ; G02F1/1333 ; C03C3/00
摘要:
A quartz glass substrate for polysilicon thin film transistor liquid crystal display, in which a halogen content is not more than 10 ppm; an OH content is not more than 100 ppm; a total content of a heavy metal element and an alkali metal element is not more than 1 ppm; and an annealing point is not less than 1,150.degree. C.
公开/授权文献
- US5857461A Multiple channel sample port 公开/授权日:1999-01-12