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US5330941A Quartz glass substrate for polysilicon thin film transistor liquid crystal display 失效
石英玻璃基板用于多晶硅薄膜晶体管液晶显示

Quartz glass substrate for polysilicon thin film transistor liquid
crystal display
摘要:
A quartz glass substrate for polysilicon thin film transistor liquid crystal display, in which a halogen content is not more than 10 ppm; an OH content is not more than 100 ppm; a total content of a heavy metal element and an alkali metal element is not more than 1 ppm; and an annealing point is not less than 1,150.degree. C.
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