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    Method for synthesizing amorphous silicon nitride
    5.
    发明授权
    Method for synthesizing amorphous silicon nitride 失效
    合成非晶氮化硅的方法

    公开(公告)号：US4416863A

    公开(公告)日：1983-11-22

    申请号：US394862

    申请日：1982-07-02

    申请人： Kimihiko Sato ,  Kunihiko Terase ,  Hitoshi Kijimuta ,  Yukinori Ohta

    发明人： Kimihiko Sato ,  Kunihiko Terase ,  Hitoshi Kijimuta ,  Yukinori Ohta

    IPC分类号： C01B21/068 ,  C01B21/06 ,  B01D59/08

    CPC分类号： C01B21/068 ,  C01P2002/02

    摘要： A method for synthesizing amorphous silicon nitride, wherein silicon halide and ammonia are reacted in a reaction vessel at a high temperature in the absence of oxygen to thereby synthesize powder of amorphous silicon nitride, then the powder is separated from a gas containing therein gaseous ammonia halide which has been produced simultaneously with said amorphous silicon nitride by use of a collecting means, comprises directly mixing, in advance of the separation, cool gas containing therein neither oxygen nor moisture into said gas to cool down said powder and gas so that both substances may be put in said collecting means without deposition of ammonium halide to the inner wall of the reaction vessel, and other component parts.

    摘要翻译： 一种合成非晶氮化硅的方法，其中卤化硅和氨在不存在氧的情况下在高温下在反应容器中反应，从而合成非晶氮化硅粉末，然后将粉末与其中含有气态氨化氢的气体分离 通过使用收集装置与所述无定形氮化硅同时生产的方法包括在分离之前将含有氧气或水分的冷气直接混合到所述气体中以冷却所述粉末和气体，使得两种物质可以 放入所述收集装置中而不将卤化铵沉积到反应容器的内壁和其它组分部分。