发明授权
- 专利标题: Device fabrication entailing plasma-derived x-ray delineation
- 专利标题(中): 器件制造需要等离子体衍生的x线描绘
-
申请号: US65331申请日: 1993-05-20
-
公开(公告)号: US5339346A公开(公告)日: 1994-08-16
- 发明人: Donald L. White
- 申请人: Donald L. White
- 申请人地址: NJ Murray Hill
- 专利权人: AT&T Bell Laboratories
- 当前专利权人: AT&T Bell Laboratories
- 当前专利权人地址: NJ Murray Hill
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G21K1/06 ; H01L21/027 ; G21K5/00
摘要:
Submicron device fabrication entailing ringfield x-ray pattern delineation is facilitated by use of a condenser including a faceted collector lens. The collector lens is constituted of paired facets, symmetrically placed about an axis of a laser-pumped plasma source. Each of the members of a pair produce an image of the entire illumination field so that inhomogeneities in illumination intensity are compensated within each composite image as produced by a particular pair.
公开/授权文献
- USD395200S Drinking mug 公开/授权日:1998-06-16