发明授权
- 专利标题: Substrate potential generator
- 专利标题(中): 基板电位发生器
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申请号: US709961申请日: 1991-06-04
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公开(公告)号: US5341035A公开(公告)日: 1994-08-23
- 发明人: Akinori Shibayama , Toshio Yamada
- 申请人: Akinori Shibayama , Toshio Yamada
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX2-146542 19900604; JPX2-313557 19901119; JPX3-118253 19910523
- 主分类号: G05F3/20
- IPC分类号: G05F3/20 ; H03L1/00 ; H03L5/00
摘要:
In a substrate potential generator, a substrate potential is supplied by a substrate potential supplier controlled by a substrate potential detector. The substrate potential detector sends a setting signal having a hysteresis characteristic relative to the substrate potential. That is, the setting signal is higher when the substrate potential supplier is stopped than when the substrate potential supplier is activated or when negative charges are injected into the substrate potential. Thus, the operation of the substrate potential supplier is stopped after the substrate potential becomes lower than the lower setting potential when the substrate potential supplier is activated, while the operation of the substrate potential supplier is started after the substrate potential becomes higher than the upper setting potential after the operation of the substrate potential supplier is stopped. Therefore, the starting and stopping of the substrate potential supplier is not repeated so frequently, so that the dissipating charge and discharge currents accompanied with the starting and stopping will not be enhanced wastefully.
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