Invention Grant
- Patent Title: Dual quad flexure scanner
- Patent Title (中): 双四重弯曲扫描仪
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Application No.: US963886Application Date: 1992-10-20
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Publication No.: US5360974APublication Date: 1994-11-01
- Inventor: James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
- Applicant: James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
- Applicant Address: NY Armonk
- Assignee: International Business Machines Corp.
- Current Assignee: International Business Machines Corp.
- Current Assignee Address: NY Armonk
- Main IPC: G01B7/34
- IPC: G01B7/34 ; B23Q1/34 ; B23Q1/36 ; B23Q1/56 ; G01B5/00 ; G01N37/00 ; G01Q10/04 ; G01Q70/04 ; G21K5/10
Abstract:
A dual quad flexure carriage and assembly, for receiving a sensing probe, is used for scanning the sensing probe across a target surface. The flexure carriage is a unitary structure providing flat motion for the sensing probe during the scanning procedure, while further compensating for thermal creep. The dual quad flexure assembly comprises the dual quad flexure carriage along with piezo actuators and control systems to provide highly linear orthogonal motion.
Public/Granted literature
- US4283255A Mass transfer process Public/Granted day:1981-08-11
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