发明授权
- 专利标题： Dual quad flexure scanner
- 专利标题（中）： 双四重弯曲扫描仪
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申请号： US963886申请日： 1992-10-20
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公开(公告)号： US5360974A公开(公告)日： 1994-11-01
- 发明人: James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
- 申请人： James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corp.
- 当前专利权人： International Business Machines Corp.
- 当前专利权人地址： NY Armonk
- 主分类号： G01B7/34
- IPC分类号： G01B7/34 ; B23Q1/34 ; B23Q1/36 ; B23Q1/56 ; G01B5/00 ; G01N37/00 ; G01Q10/04 ; G01Q70/04 ; G21K5/10
摘要：
A dual quad flexure carriage and assembly, for receiving a sensing probe, is used for scanning the sensing probe across a target surface. The flexure carriage is a unitary structure providing flat motion for the sensing probe during the scanning procedure, while further compensating for thermal creep. The dual quad flexure assembly comprises the dual quad flexure carriage along with piezo actuators and control systems to provide highly linear orthogonal motion.
公开/授权文献
- US4283255A Mass transfer process 公开/授权日：1981-08-11
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