发明授权
- 专利标题: Hard wear-resistant film and method for production thereof
- 专利标题(中): 硬质耐磨膜及其制造方法
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申请号: US120735申请日: 1993-09-14
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公开(公告)号: US5366564A公开(公告)日: 1994-11-22
- 发明人: Hiroshi Yamagata , Akihisa Inoue , Tsuyoshi Masumoto
- 申请人: Hiroshi Yamagata , Akihisa Inoue , Tsuyoshi Masumoto
- 申请人地址: JPX Tokyo JPX Miyagi JPX Miyagi
- 专利权人: Yoshida Kogyo K.K.,Masumoto; Ysuyoshi,Inoue; Akihisa
- 当前专利权人: Yoshida Kogyo K.K.,Masumoto; Ysuyoshi,Inoue; Akihisa
- 当前专利权人地址: JPX Tokyo JPX Miyagi JPX Miyagi
- 优先权: JPX4-270807 19920916
- 主分类号: C23C14/00
- IPC分类号: C23C14/00 ; C23C14/06 ; C23C14/14 ; C23C14/22 ; C23C14/24 ; C23C14/32 ; C23C14/34 ; C22C21/00
摘要:
A hard wear-resistant film is formed on a substrate in an atmosphere of an inert gas by using a target of a composition of Al.sub.a Ti.sub.b (wherein "a" and "b" stand for atomic percentages respectively in the ranges of 62 at %.ltoreq.a.ltoreq.85 at % and 15 at %.ltoreq.b.ltoreq.38 at %, providing a+b=100 at %) or Al.sub.c Ta.sub.d (wherein "c" and "d" stand for atomic percentages respectively in the ranges of 60 at %.ltoreq.c.ltoreq.80 at % and 20 at %.ltoreq.d.ltoreq.40 at %, providing c+d=100 at %) and by a sputtering process or ion plating process while varying continuously or stepwise the feed rate of a nitrogen-containing reaction gas into a chamber. The film consequently formed has a composition and structure thereof continuously or stepwise varied from a substantially amorphous metal of a part being in contact with the substrate to an (Al, Ti)N or (Al, Ta)N crystalline ceramic phase with the nitrogen content continuously or stepwise increased in the direction of the surface of the film.
公开/授权文献
- USD429877S Portion of a shoe sole 公开/授权日:2000-08-29