发明授权
- 专利标题: Frame-supported pellicle for protection of photolithographic mask
- 专利标题(中): 框架支撑防护薄膜,用于保护光刻掩模
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申请号: US7525申请日: 1993-01-22
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公开(公告)号: US5370951A公开(公告)日: 1994-12-06
- 发明人: Yoshihiro Kubota , Meguru Kashida , Yuichi Hamada , Hirofumi Kishita , Shinichi Sato , Kouichi Yamaguchi
- 申请人: Yoshihiro Kubota , Meguru Kashida , Yuichi Hamada , Hirofumi Kishita , Shinichi Sato , Kouichi Yamaguchi
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-045988 19920131
- 主分类号: C08L83/04
- IPC分类号: C08L83/04 ; C08K5/5435 ; C09J183/14 ; G03F1/62 ; H01L21/027 ; G03F9/00
摘要:
An improvement is proposed in a frame-supported pellicle, i.e. a thin transparent film of a polymeric resin adhesively bonded to a frame member, used for dust-proof protection of a photomask in a photolithographic patterning work for the manufacture of electronic devices. The improvement comprises using, as the adhesive, an organopolysiloxane-based composition which comprises (a) a perfluoroalkyl-containing diorganopolysiloxane having at least two vinyl groups per molecule, (b) an organohydrogenpolysiloxane having at least one epoxy group and (c) a platinum catalyst for promoting the hydrosilation reaction between (a) and (b). As compared with conventional adhesives, a quite good adhesive bonding strength can be obtained with this adhesive even when the membrane is made from a fluorocarbon group-containing polymeric resin and the adhesive layer obtained therefrom is highly resistant against ultraviolet irradiation to ensure a long serviceable life of the pellicle.
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